Readout circuit for capacitance ratio measurement

T.S.J. Lammerink; J. Groenesteijn; J.C. Lötters; R.J. Wiegerink

doi:10.13140/RG.2.1.1761.6727

Readout circuit for capacitance ratio measurement

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Abstract

This paper presents a technique for measuring the ratio between two on-chip capacitances which largely eliminates the influence of drift in the electronic measurement circuit. Measurement results on an inline capacitive pressure sensor are presented.

Original language	English
Title of host publication	41st International Conference on Micro- and Nano-Engineering, MNE 2015
Place of Publication	Enschede
Publisher	University of Twente
Number of pages	1
DOIs	https://doi.org/10.13140/RG.2.1.1761.6727
Publication status	Published - 21 Sept 2015
Event	41st International Conference on Micro- and Nano-Engineering, MNE 2015 - The Hague, Netherlands Duration: 21 Sept 2015 → 24 Sept 2015 Conference number: 41

Conference

Conference	41st International Conference on Micro- and Nano-Engineering, MNE 2015
Abbreviated title	MNE
Country/Territory	Netherlands
City	The Hague
Period	21/09/15 → 24/09/15

Keywords

Inline pressure sensor
Capacitive readout

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10.13140/RG.2.1.1761.6727

ArticleFinal published version, 215 KB

Cite this

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title = "Readout circuit for capacitance ratio measurement",

abstract = "This paper presents a technique for measuring the ratio between two on-chip capacitances which largely eliminates the influence of drift in the electronic measurement circuit. Measurement results on an inline capacitive pressure sensor are presented.",

keywords = "Inline pressure sensor, Capacitive readout",

author = "T.S.J. Lammerink and J. Groenesteijn and J.C. L{\"o}tters and R.J. Wiegerink",

year = "2015",

month = sep,

day = "21",

doi = "10.13140/RG.2.1.1761.6727",

language = "English",

booktitle = "41st International Conference on Micro- and Nano-Engineering, MNE 2015",

publisher = "University of Twente",

address = "Netherlands",

note = "41st International Conference on Micro- and Nano-Engineering, MNE 2015, MNE ; Conference date: 21-09-2015 Through 24-09-2015",

}

Lammerink, TSJ, Groenesteijn, J , Lötters, JC & Wiegerink, RJ 2015, Readout circuit for capacitance ratio measurement. in 41st International Conference on Micro- and Nano-Engineering, MNE 2015. University of Twente, Enschede, 41st International Conference on Micro- and Nano-Engineering, MNE 2015, The Hague, Netherlands, 21/09/15. https://doi.org/10.13140/RG.2.1.1761.6727

TY - GEN

T1 - Readout circuit for capacitance ratio measurement

AU - Lammerink, T.S.J.

AU - Groenesteijn, J.

AU - Lötters, J.C.

AU - Wiegerink, R.J.

N1 - Conference code: 41

PY - 2015/9/21

Y1 - 2015/9/21

N2 - This paper presents a technique for measuring the ratio between two on-chip capacitances which largely eliminates the influence of drift in the electronic measurement circuit. Measurement results on an inline capacitive pressure sensor are presented.

AB - This paper presents a technique for measuring the ratio between two on-chip capacitances which largely eliminates the influence of drift in the electronic measurement circuit. Measurement results on an inline capacitive pressure sensor are presented.

KW - Inline pressure sensor

KW - Capacitive readout

U2 - 10.13140/RG.2.1.1761.6727

DO - 10.13140/RG.2.1.1761.6727

M3 - Conference contribution

BT - 41st International Conference on Micro- and Nano-Engineering, MNE 2015

PB - University of Twente

CY - Enschede

T2 - 41st International Conference on Micro- and Nano-Engineering, MNE 2015

Y2 - 21 September 2015 through 24 September 2015

ER -

Readout circuit for capacitance ratio measurement

Abstract

Conference

Keywords

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