Real-time afbeelden van dunne-filmgroei

W.A. Wessels, Tjeerd Rogier Johannes Bollmann, Gertjan Koster, Augustinus J.H.M. Rijnders

Research output: Contribution to journal › Article › Academic

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Keywords

@article{7708bec7bed54e369da176759f2d4811,

title = "Real-time afbeelden van dunne-filmgroei",

keywords = "METIS-314010, IR-99854",

author = "W.A. Wessels and Bollmann, {Tjeerd Rogier Johannes} and Gertjan Koster and Rijnders, {Augustinus J.H.M.}",

year = "2015",

language = "Dutch",

volume = "53",

pages = "6--9",

journal = "NEVAC blad",

issn = "0169-9431",

publisher = "Nederlandse Vacuumvereniging",

number = "1",

}