Realisation of Multimode Interference Devices in PECVD-SiON Waveguide Technology

S.E. Macdonald, M.R. Paiam, A. Driessen, Kerstin Worhoff, N.S. Lagali

Research output: Other contributionOther research output

Original languageUndefined
Place of PublicationEnschede
Publication statusPublished - 23 Jun 1998

Keywords

  • METIS-130805

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