Realisation of Multimode Interference Devices in PECVD-SiON Waveguide Technology

S.E. Macdonald, M.R. Paiam, A. Driessen, Kerstin Worhoff, N.S. Lagali

Research output: Other contributionOther research output

Original languageUndefined
Place of PublicationEnschede
Publication statusPublished - 23 Jun 1998

Keywords

  • METIS-130805

Cite this

Macdonald, S. E., Paiam, M. R., Driessen, A., Worhoff, K., & Lagali, N. S. (1998, Jun 23). Realisation of Multimode Interference Devices in PECVD-SiON Waveguide Technology. Enschede.