Realization of 2-dimensional air-bridge silicon photonic crystals by focused ion beam milling and nanopolishing

W.C.L. Hopman, R.M. de Ridder, Shankar Selvaraja, C.G. Bostan, V.J. Gadgil, L. Kuipers, A. Driessen

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

3 Citations (Scopus)
55 Downloads (Pure)

Abstract

We report the design and fabrication of small photonic crystal structures which are combined with conventional dielectric ridge waveguides. We describe in details the fabrication of both rough and smooth membranes, which are used as host for photonic crystals. Two Focused Ion Beam milling experiments are highlighted: the first one shows how photonic crystals can be fast and accurate milled into a Si membrane, whereas the second experiment demonstrates how focused ion beam milling can turn a rough surface into a well-patterned nano-smooth surface. The previously ultra rough surface showed no detectable roughness after milling due to the nanopolishing effect of the focused ion beam milling.
Original languageUndefined
Title of host publicationPhotonics Europe 2006
Place of PublicationBellingham, WA, USA
PublisherSPIE - The International Society for Optical Engineering
Pages167-173
Number of pages7
ISBN (Print)0-8194-6238-1
DOIs
Publication statusPublished - Apr 2006

Publication series

NameProceedings of Spie
PublisherSPIE The International Society for Optical Engineering
Volume6182
ISSN (Print)0277-786X

Keywords

  • IOMS-SNS: SENSORS
  • IOMS-PCS: PHOTONIC CRYSTAL STRUCTURES
  • IR-65631
  • METIS-235625
  • EWI-2823

Cite this

Hopman, W. C. L., de Ridder, R. M., Selvaraja, S., Bostan, C. G., Gadgil, V. J., Kuipers, L., & Driessen, A. (2006). Realization of 2-dimensional air-bridge silicon photonic crystals by focused ion beam milling and nanopolishing. In Photonics Europe 2006 (pp. 167-173). (Proceedings of Spie; Vol. 6182). Bellingham, WA, USA: SPIE - The International Society for Optical Engineering. https://doi.org/10.1117/12.666788
Hopman, W.C.L. ; de Ridder, R.M. ; Selvaraja, Shankar ; Bostan, C.G. ; Gadgil, V.J. ; Kuipers, L. ; Driessen, A. / Realization of 2-dimensional air-bridge silicon photonic crystals by focused ion beam milling and nanopolishing. Photonics Europe 2006. Bellingham, WA, USA : SPIE - The International Society for Optical Engineering, 2006. pp. 167-173 (Proceedings of Spie).
@inproceedings{7aa5365d9e8c4af185bd52d9f9c4109d,
title = "Realization of 2-dimensional air-bridge silicon photonic crystals by focused ion beam milling and nanopolishing",
abstract = "We report the design and fabrication of small photonic crystal structures which are combined with conventional dielectric ridge waveguides. We describe in details the fabrication of both rough and smooth membranes, which are used as host for photonic crystals. Two Focused Ion Beam milling experiments are highlighted: the first one shows how photonic crystals can be fast and accurate milled into a Si membrane, whereas the second experiment demonstrates how focused ion beam milling can turn a rough surface into a well-patterned nano-smooth surface. The previously ultra rough surface showed no detectable roughness after milling due to the nanopolishing effect of the focused ion beam milling.",
keywords = "IOMS-SNS: SENSORS, IOMS-PCS: PHOTONIC CRYSTAL STRUCTURES, IR-65631, METIS-235625, EWI-2823",
author = "W.C.L. Hopman and {de Ridder}, R.M. and Shankar Selvaraja and C.G. Bostan and V.J. Gadgil and L. Kuipers and A. Driessen",
note = "http://eprints.eemcs.utwente.nl/2823/",
year = "2006",
month = "4",
doi = "10.1117/12.666788",
language = "Undefined",
isbn = "0-8194-6238-1",
series = "Proceedings of Spie",
publisher = "SPIE - The International Society for Optical Engineering",
pages = "167--173",
booktitle = "Photonics Europe 2006",

}

Hopman, WCL, de Ridder, RM, Selvaraja, S, Bostan, CG, Gadgil, VJ, Kuipers, L & Driessen, A 2006, Realization of 2-dimensional air-bridge silicon photonic crystals by focused ion beam milling and nanopolishing. in Photonics Europe 2006. Proceedings of Spie, vol. 6182, SPIE - The International Society for Optical Engineering, Bellingham, WA, USA, pp. 167-173. https://doi.org/10.1117/12.666788

Realization of 2-dimensional air-bridge silicon photonic crystals by focused ion beam milling and nanopolishing. / Hopman, W.C.L.; de Ridder, R.M.; Selvaraja, Shankar; Bostan, C.G.; Gadgil, V.J.; Kuipers, L.; Driessen, A.

Photonics Europe 2006. Bellingham, WA, USA : SPIE - The International Society for Optical Engineering, 2006. p. 167-173 (Proceedings of Spie; Vol. 6182).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Realization of 2-dimensional air-bridge silicon photonic crystals by focused ion beam milling and nanopolishing

AU - Hopman, W.C.L.

AU - de Ridder, R.M.

AU - Selvaraja, Shankar

AU - Bostan, C.G.

AU - Gadgil, V.J.

AU - Kuipers, L.

AU - Driessen, A.

N1 - http://eprints.eemcs.utwente.nl/2823/

PY - 2006/4

Y1 - 2006/4

N2 - We report the design and fabrication of small photonic crystal structures which are combined with conventional dielectric ridge waveguides. We describe in details the fabrication of both rough and smooth membranes, which are used as host for photonic crystals. Two Focused Ion Beam milling experiments are highlighted: the first one shows how photonic crystals can be fast and accurate milled into a Si membrane, whereas the second experiment demonstrates how focused ion beam milling can turn a rough surface into a well-patterned nano-smooth surface. The previously ultra rough surface showed no detectable roughness after milling due to the nanopolishing effect of the focused ion beam milling.

AB - We report the design and fabrication of small photonic crystal structures which are combined with conventional dielectric ridge waveguides. We describe in details the fabrication of both rough and smooth membranes, which are used as host for photonic crystals. Two Focused Ion Beam milling experiments are highlighted: the first one shows how photonic crystals can be fast and accurate milled into a Si membrane, whereas the second experiment demonstrates how focused ion beam milling can turn a rough surface into a well-patterned nano-smooth surface. The previously ultra rough surface showed no detectable roughness after milling due to the nanopolishing effect of the focused ion beam milling.

KW - IOMS-SNS: SENSORS

KW - IOMS-PCS: PHOTONIC CRYSTAL STRUCTURES

KW - IR-65631

KW - METIS-235625

KW - EWI-2823

U2 - 10.1117/12.666788

DO - 10.1117/12.666788

M3 - Conference contribution

SN - 0-8194-6238-1

T3 - Proceedings of Spie

SP - 167

EP - 173

BT - Photonics Europe 2006

PB - SPIE - The International Society for Optical Engineering

CY - Bellingham, WA, USA

ER -

Hopman WCL, de Ridder RM, Selvaraja S, Bostan CG, Gadgil VJ, Kuipers L et al. Realization of 2-dimensional air-bridge silicon photonic crystals by focused ion beam milling and nanopolishing. In Photonics Europe 2006. Bellingham, WA, USA: SPIE - The International Society for Optical Engineering. 2006. p. 167-173. (Proceedings of Spie). https://doi.org/10.1117/12.666788