Realization of 2-dimensional air-bridge silicon photonic crystals by focused ion beam milling and nanopolishing

W.C.L. Hopman, R.M. de Ridder, Shankar Selvaraja, C.G. Bostan, V.J. Gadgil, L. Kuipers, A. Driessen

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

3 Citations (Scopus)
71 Downloads (Pure)

Abstract

We report the design and fabrication of small photonic crystal structures which are combined with conventional dielectric ridge waveguides. We describe in details the fabrication of both rough and smooth membranes, which are used as host for photonic crystals. Two Focused Ion Beam milling experiments are highlighted: the first one shows how photonic crystals can be fast and accurate milled into a Si membrane, whereas the second experiment demonstrates how focused ion beam milling can turn a rough surface into a well-patterned nano-smooth surface. The previously ultra rough surface showed no detectable roughness after milling due to the nanopolishing effect of the focused ion beam milling.
Original languageUndefined
Title of host publicationPhotonics Europe 2006
Place of PublicationBellingham, WA, USA
PublisherSPIE - The International Society for Optical Engineering
Pages167-173
Number of pages7
ISBN (Print)0-8194-6238-1
DOIs
Publication statusPublished - Apr 2006

Publication series

NameProceedings of Spie
PublisherSPIE The International Society for Optical Engineering
Volume6182
ISSN (Print)0277-786X

Keywords

  • IOMS-SNS: SENSORS
  • IOMS-PCS: PHOTONIC CRYSTAL STRUCTURES
  • IR-65631
  • METIS-235625
  • EWI-2823

Cite this

Hopman, W. C. L., de Ridder, R. M., Selvaraja, S., Bostan, C. G., Gadgil, V. J., Kuipers, L., & Driessen, A. (2006). Realization of 2-dimensional air-bridge silicon photonic crystals by focused ion beam milling and nanopolishing. In Photonics Europe 2006 (pp. 167-173). (Proceedings of Spie; Vol. 6182). Bellingham, WA, USA: SPIE - The International Society for Optical Engineering. https://doi.org/10.1117/12.666788