Realization of an integrated VDF/TrFE copolymer-on-silicon pyroelectric sensor

D. Setiadi, D. Setiadi, Paulus P.L. Regtien, P.M. Sarro

Research output: Contribution to journalArticleAcademicpeer-review

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Abstract

An integrated pyroelectric sensor based on a vinylidene fluoride trifluoroethylene (VDF/TrFE) copolymer is presented. A silicon substrate that contains FET readout electronics is coated with the VDF/TrFE copolymer film using a spin-coating technique. On-chip poling of the copolymer has been applied using a step-wise poling at room temperature. The copolymer deposition and polarization are compatible with semiconductor technology. A 3×1 integrated pyroelectric sensor has been realized. Voltage sensitivity and noise of this sensor have been measured.
Original languageUndefined
Pages (from-to)85-88
Number of pages4
JournalMicroelectronic engineering
Volume29
Issue number29
DOIs
Publication statusPublished - 1995

Keywords

  • METIS-111741
  • IR-14693

Cite this

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title = "Realization of an integrated VDF/TrFE copolymer-on-silicon pyroelectric sensor",
abstract = "An integrated pyroelectric sensor based on a vinylidene fluoride trifluoroethylene (VDF/TrFE) copolymer is presented. A silicon substrate that contains FET readout electronics is coated with the VDF/TrFE copolymer film using a spin-coating technique. On-chip poling of the copolymer has been applied using a step-wise poling at room temperature. The copolymer deposition and polarization are compatible with semiconductor technology. A 3×1 integrated pyroelectric sensor has been realized. Voltage sensitivity and noise of this sensor have been measured.",
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author = "D. Setiadi and D. Setiadi and Regtien, {Paulus P.L.} and P.M. Sarro",
year = "1995",
doi = "10.1016/0167-9317(95)00120-4",
language = "Undefined",
volume = "29",
pages = "85--88",
journal = "Microelectronic engineering",
issn = "0167-9317",
publisher = "Elsevier",
number = "29",

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Realization of an integrated VDF/TrFE copolymer-on-silicon pyroelectric sensor. / Setiadi, D.; Setiadi, D.; Regtien, Paulus P.L.; Sarro, P.M.

In: Microelectronic engineering, Vol. 29, No. 29, 1995, p. 85-88.

Research output: Contribution to journalArticleAcademicpeer-review

TY - JOUR

T1 - Realization of an integrated VDF/TrFE copolymer-on-silicon pyroelectric sensor

AU - Setiadi, D.

AU - Setiadi, D.

AU - Regtien, Paulus P.L.

AU - Sarro, P.M.

PY - 1995

Y1 - 1995

N2 - An integrated pyroelectric sensor based on a vinylidene fluoride trifluoroethylene (VDF/TrFE) copolymer is presented. A silicon substrate that contains FET readout electronics is coated with the VDF/TrFE copolymer film using a spin-coating technique. On-chip poling of the copolymer has been applied using a step-wise poling at room temperature. The copolymer deposition and polarization are compatible with semiconductor technology. A 3×1 integrated pyroelectric sensor has been realized. Voltage sensitivity and noise of this sensor have been measured.

AB - An integrated pyroelectric sensor based on a vinylidene fluoride trifluoroethylene (VDF/TrFE) copolymer is presented. A silicon substrate that contains FET readout electronics is coated with the VDF/TrFE copolymer film using a spin-coating technique. On-chip poling of the copolymer has been applied using a step-wise poling at room temperature. The copolymer deposition and polarization are compatible with semiconductor technology. A 3×1 integrated pyroelectric sensor has been realized. Voltage sensitivity and noise of this sensor have been measured.

KW - METIS-111741

KW - IR-14693

U2 - 10.1016/0167-9317(95)00120-4

DO - 10.1016/0167-9317(95)00120-4

M3 - Article

VL - 29

SP - 85

EP - 88

JO - Microelectronic engineering

JF - Microelectronic engineering

SN - 0167-9317

IS - 29

ER -