Realization of an integrated VDF/TrFE copolymer-on-silicon pyroelectric sensor

D. Setiadi, D. Setiadi, Paulus P.L. Regtien, P.M. Sarro

    Research output: Contribution to journalArticleAcademicpeer-review

    119 Downloads (Pure)


    An integrated pyroelectric sensor based on a vinylidene fluoride trifluoroethylene (VDF/TrFE) copolymer is presented. A silicon substrate that contains FET readout electronics is coated with the VDF/TrFE copolymer film using a spin-coating technique. On-chip poling of the copolymer has been applied using a step-wise poling at room temperature. The copolymer deposition and polarization are compatible with semiconductor technology. A 3×1 integrated pyroelectric sensor has been realized. Voltage sensitivity and noise of this sensor have been measured.
    Original languageUndefined
    Pages (from-to)85-88
    Number of pages4
    JournalMicroelectronic engineering
    Issue number29
    Publication statusPublished - 1995


    • METIS-111741
    • IR-14693

    Cite this