An integrated pyroelectric sensor based on a vinylidene fluoride trifluoroethylene (VDF/TrFE) copolymer is presented. A silicon substrate that contains FET readout electronics is coated with the VDF/TrFE copolymer film using a spin-coating technique. On-chip poling of the copolymer has been applied using a step-wise poling at room temperature. The copolymer deposition and polarization are compatible with semiconductor technology. A 3×1 integrated pyroelectric sensor has been realized. Voltage sensitivity and noise of this sensor have been measured.
Setiadi, D., Setiadi, D., Regtien, P. P. L., & Sarro, P. M. (1995). Realization of an integrated VDF/TrFE copolymer-on-silicon pyroelectric sensor. Microelectronic engineering, 29(29), 85-88. https://doi.org/10.1016/0167-9317(95)00120-4