Realization of an integrated VDF/TrFE copolymer-on-silicon pyroelectric sensor

D. Setiadi; D. Setiadi; Paulus P.L. Regtien; P.M. Sarro

doi:10.1016/0167-9317(95)00120-4

Realization of an integrated VDF/TrFE copolymer-on-silicon pyroelectric sensor

D. Setiadi
, D. Setiadi
, Paulus P.L. Regtien
, P.M. Sarro

Research output: Contribution to journal › Article › Academic › peer-review

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Abstract

An integrated pyroelectric sensor based on a vinylidene fluoride trifluoroethylene (VDF/TrFE) copolymer is presented. A silicon substrate that contains FET readout electronics is coated with the VDF/TrFE copolymer film using a spin-coating technique. On-chip poling of the copolymer has been applied using a step-wise poling at room temperature. The copolymer deposition and polarization are compatible with semiconductor technology. A 3×1 integrated pyroelectric sensor has been realized. Voltage sensitivity and noise of this sensor have been measured.

Original language	Undefined
Pages (from-to)	85-88
Number of pages	4
Journal	Microelectronic engineering
Volume	29
Issue number	29
DOIs	https://doi.org/10.1016/0167-9317(95)00120-4
Publication status	Published - 1995

Keywords

METIS-111741
IR-14693

Access to Document

10.1016/0167-9317(95)00120-4

Setiadi95realization

Cite this

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title = "Realization of an integrated VDF/TrFE copolymer-on-silicon pyroelectric sensor",

abstract = "An integrated pyroelectric sensor based on a vinylidene fluoride trifluoroethylene (VDF/TrFE) copolymer is presented. A silicon substrate that contains FET readout electronics is coated with the VDF/TrFE copolymer film using a spin-coating technique. On-chip poling of the copolymer has been applied using a step-wise poling at room temperature. The copolymer deposition and polarization are compatible with semiconductor technology. A 3×1 integrated pyroelectric sensor has been realized. Voltage sensitivity and noise of this sensor have been measured.",

keywords = "METIS-111741, IR-14693",

author = "D. Setiadi and D. Setiadi and Regtien, \{Paulus P.L.\} and P.M. Sarro",

year = "1995",

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language = "Undefined",

volume = "29",

pages = "85--88",

journal = "Microelectronic engineering",

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T1 - Realization of an integrated VDF/TrFE copolymer-on-silicon pyroelectric sensor

AU - Setiadi, D.

AU - Regtien, Paulus P.L.

AU - Sarro, P.M.

PY - 1995

Y1 - 1995

N2 - An integrated pyroelectric sensor based on a vinylidene fluoride trifluoroethylene (VDF/TrFE) copolymer is presented. A silicon substrate that contains FET readout electronics is coated with the VDF/TrFE copolymer film using a spin-coating technique. On-chip poling of the copolymer has been applied using a step-wise poling at room temperature. The copolymer deposition and polarization are compatible with semiconductor technology. A 3×1 integrated pyroelectric sensor has been realized. Voltage sensitivity and noise of this sensor have been measured.

AB - An integrated pyroelectric sensor based on a vinylidene fluoride trifluoroethylene (VDF/TrFE) copolymer is presented. A silicon substrate that contains FET readout electronics is coated with the VDF/TrFE copolymer film using a spin-coating technique. On-chip poling of the copolymer has been applied using a step-wise poling at room temperature. The copolymer deposition and polarization are compatible with semiconductor technology. A 3×1 integrated pyroelectric sensor has been realized. Voltage sensitivity and noise of this sensor have been measured.

KW - METIS-111741

KW - IR-14693

U2 - 10.1016/0167-9317(95)00120-4

DO - 10.1016/0167-9317(95)00120-4

M3 - Article

SN - 0167-9317

VL - 29

SP - 85

EP - 88

JO - Microelectronic engineering

JF - Microelectronic engineering

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