Realization of an orthogonal cubic silicon box for a triaxial accelerometer

B.J. Kooi, Johan G. Bomer, Piet Bergveld

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

    Original languageUndefined
    Title of host publicationIWMF 2000
    Place of PublicationFribourg, Zwitserland
    Pages-
    Number of pages4
    Publication statusPublished - 9 Oct 2000

    Keywords

    • METIS-113822

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