Realization of an orthogonal cubic silicon box for a triaxial accelerometer

B.J. Kooi, Johan G. Bomer, Piet Bergveld

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationIWMF 2000
    Place of PublicationFribourg, Zwitserland
    Pages-
    Number of pages4
    Publication statusPublished - 9 Oct 2000

    Keywords

    • METIS-113822

    Cite this

    Kooi, B. J., Bomer, J. G., & Bergveld, P. (2000). Realization of an orthogonal cubic silicon box for a triaxial accelerometer. In IWMF 2000 (pp. -). Fribourg, Zwitserland.