Realization of Silicon-Nanodots-Based CMOS Backend-Compatible Electrical SPP Source

I. Brunets, Robert J. Walters, Alexeij Y. Kovalgin, Albert Polman, Jurriaan Schmitz

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic


    Integrated circuit components have nowadays reached dimensions much smaller than the dimensions oftypical micro-optical components. This “size mismatch‿ is regarded as a practical concern for a variety of integrated optics applications. The application of surface plasmon polaritons (SPPs) generated at metal/dielectric interfaces provides light confinement and control at length scales below 100 nm, herewith overcoming this size mismatch [1], [2]. The SPP can propagate with an effective wavelength much smaller than the free-space wavelength of photons at the same frequency. In contemporary SPP research, plasmons are normally generated by external lasers. In a recent article [2] we have presented an electrical SPP source (shown in Fig. 1), operating at low supply voltage, and manufactured using CMOS backend compatible techniques. When a current is applied to our device, we observe emission at the location of the out-coupling grating array.
    Original languageUndefined
    Title of host publication219th ECS Meeting
    Place of PublicationPennington, NJ, USA
    PublisherElectro Chemical Society
    Number of pages4
    ISBN (Print)2151-2043
    Publication statusPublished - 1 May 2011
    Event219th ECS Meeting - The Palais des Congres de Montreal, Montreal, QC, Canada
    Duration: 1 May 20116 May 2011
    Conference number: 219

    Publication series

    NameMeeting Abstracts
    PublisherElectrochemical Society
    ISSN (Print)2151-2043


    Conference219th ECS Meeting
    CityMontreal, QC


    • METIS-284914
    • EWI-20732
    • IR-79893

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