Recommended reading list of early publications on atomic layer deposition-outcome of the "virtual project on the history of ALD"

E. Ahvenniemi, A.R. Akbashev, S. Ali, M. Bechelany, Maria Berdova, S. Boyadjiev, D.C. Cameron, R. Chen, M. Chubarov, V. Cremers, A. Devi, V. Drozd, L. Elnikova, G. Gottardi, K. Grigoras, D.M. Hausmann, C.S. Hwang, S.H. Jen, T. Kallio, J. KanervoI. Khmelnitskiy, D.H. Kim, L. Klibanov, Y. Koshtyal, A.O.I. Krause, J. Kuhs, I. Karkkanen, M.L. Kaariainen, T. Kaariainen, L. Lamagna, A.A. Lapicki, M. Leskela, H. Lipsanen, J. Lyytinen, A. Malkov, A. Malygin, A. Mennad, C. Militzer, J. Molarius, M. Norek, C. Ozgit-Akgun, M. Panov, H. Pedersen, F. Piallat, G. Popov, R.L. Puurunen, G. Rampelberg, R.H.A. Ras, E. Rauwel, F. Roozeboom, T. Sajavaara, H. Salami, H. Savin, N. Schneider, T.E. Seidel, J. Sundqvist, D.B. Suyatin, T. Torndahl, J.R. van Ommen, C. Wiemer, O.M.E. Ylivaara, O. Yurkevich

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