Reduced pressure silicon CVD on hemispherical substrates

Johannes G.E. Gardeniers, C.M. Klein douwel, L.J. Giling

Research output: Contribution to journal › Article › Academic › peer-review

Keywords

@article{1b548cdddb6149ff8312611cd8690b36,

title = "Reduced pressure silicon CVD on hemispherical substrates",

keywords = "METIS-112139",

author = "Gardeniers, {Johannes G.E.} and {Klein douwel}, C.M. and L.J. Giling",

year = "1991",

language = "Undefined",

volume = "0",

pages = "319--334",

journal = "Journal of crystal growth",

issn = "0022-0248",

publisher = "Elsevier",

number = "108",

}