Reduced pressure silicon CVD on hemispherical substrates

Johannes G.E. Gardeniers, C.M. Klein douwel, L.J. Giling

    Research output: Contribution to journalArticleAcademicpeer-review

    3 Citations (Scopus)
    Original languageUndefined
    Pages (from-to)319-334
    Number of pages0
    JournalJournal of crystal growth
    Volume0
    Issue number108
    Publication statusPublished - 1991

    Keywords

    • METIS-112139

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