Reducing AC impedance measurement errors caused by the DC voltage dependence of broadband high-voltage bias-tees

M.P.J. Tiggelman, K. Reimann, Jurriaan Schmitz

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    6 Citations (Scopus)
    581 Downloads (Pure)

    Abstract

    During the AC impedance characterization of devices, from the kHz-range up to the GHz-range, accuracy can be lost when a DC voltage is applied. Commercial high-voltage broadband bias-tees are often voltage-dependent, which can cause inaccuracies at low frequencies. A calibration technique with applied bias significantly improves the measurement accuracy. Additionally, a bias-tee has been developed with a voltageindependent capacitor, suitable for DC voltages up to 500 V showing excellent performance up to several gigahertz. PIN diode limiters protect the measurement equipment from damage in case of a device breakdown.
    Original languageUndefined
    Title of host publicationProceeding of 2007 IEEE International Conference on Microelectronic Test Structures,
    Place of PublicationLos Alamitos
    PublisherIEEE Computer Society Press
    Pages200-205
    Number of pages6
    ISBN (Print)1-4244-0781-8
    DOIs
    Publication statusPublished - 19 Mar 2007
    Event20th IEEE International Conference on Microelectronic Test Structures, ICMTS 2007 - Tokyo, Japan
    Duration: 19 Mar 200722 Mar 2007
    Conference number: 20

    Publication series

    Name
    PublisherIEEE Computer Society Press
    NumberLNCS4549

    Conference

    Conference20th IEEE International Conference on Microelectronic Test Structures, ICMTS 2007
    Abbreviated titleICMTS
    CountryJapan
    CityTokyo
    Period19/03/0722/03/07

    Keywords

    • EWI-10431
    • IR-64167
    • METIS-242187

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