Reducing redeposition on KYW waveguides through hard mask engineering

S.M. Martinussen, M. Dijkstra, S.M. García Blanco

Research output: Contribution to conferencePosterOther research output

Original languageEnglish
Publication statusPublished - 27 Nov 2017
EventIEEE Photonics Benelux 2017 - Delft University of Technology, Delft, Netherlands
Duration: 27 Nov 201728 Nov 2017

Conference

ConferenceIEEE Photonics Benelux 2017
CountryNetherlands
CityDelft
Period27/11/1728/11/17

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