Reducing redeposition on KYW waveguides through hard mask engineering

S.M. Martinussen, M. Dijkstra, S.M. García Blanco

Research output: Contribution to conference › Poster

Original languageEnglish
Publication statusPublished - 27 Nov 2017

Cite this

Martinussen, S.M. ; Dijkstra, M. ; García Blanco, S.M. . / Reducing redeposition on KYW waveguides through hard mask engineering.
@conference{2d90094667ac4d05a657800337e9af02,
title = "Reducing redeposition on KYW waveguides through hard mask engineering",
author = "S.M. Martinussen and M. Dijkstra and {Garc{\'i}a Blanco}, S.M.",
year = "2017",
month = "11",
day = "27",
language = "English",

}

Martinussen, SM, Dijkstra, M & García Blanco, SM 2017, 'Reducing redeposition on KYW waveguides through hard mask engineering'.

Reducing redeposition on KYW waveguides through hard mask engineering. / Martinussen, S.M. ; Dijkstra, M. ; García Blanco, S.M. .

2017.

Research output: Contribution to conference › Poster

TY - CONF

T1 - Reducing redeposition on KYW waveguides through hard mask engineering

AU - Martinussen, S.M.

AU - Dijkstra, M.

AU - García Blanco, S.M.

PY - 2017/11/27

Y1 - 2017/11/27

M3 - Poster

ER -

Martinussen SM, Dijkstra M, García Blanco SM. Reducing redeposition on KYW waveguides through hard mask engineering. 2017.