Reduction of hydrogen induced losses in PECVD-SiOxNy optical waveguides in the near infrared

H. Albers, L.T.H. Hilderink, E. Snilagyi, F. Passti, Paul Lambeck, T.J.A. Popma

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    12 Citations (Scopus)
    36 Downloads (Pure)

    Abstract

    The hydrogen in PECVD-SiOxNy was studied with IR spectroscopy and ERD analysis as a function of the O/N ratio and the annealing treatment up to 1150°C. The results were compared with measured spectral waveguide losses
    Original languageUndefined
    Title of host publicationLEOS '95, IEEE Lasers and electro-optics society 1995
    Place of PublicationSan Fransisco
    PublisherIEEE
    Pages88-89
    DOIs
    Publication statusPublished - 30 Oct 1995
    Event8th Annual Meeting of the Lasers and Electro-Optics Society (LEOS) 1995 - San Francisco, United States
    Duration: 30 Oct 199531 Oct 1995
    Conference number: 8

    Publication series

    Name
    PublisherIEEE
    Volume2

    Conference

    Conference8th Annual Meeting of the Lasers and Electro-Optics Society (LEOS) 1995
    CountryUnited States
    CitySan Francisco
    Period30/10/9531/10/95

    Keywords

    • METIS-112750
    • IR-15868

    Cite this

    Albers, H., Hilderink, L. T. H., Snilagyi, E., Passti, F., Lambeck, P., & Popma, T. J. A. (1995). Reduction of hydrogen induced losses in PECVD-SiOxNy optical waveguides in the near infrared. In LEOS '95, IEEE Lasers and electro-optics society 1995 (pp. 88-89). San Fransisco: IEEE. https://doi.org/10.1109/LEOS.1995.484610