Reduction of hydrogen induced losses in PECVD-SiOxNy optical waveguides in the near infrared

H. Albers; L.T.H. Hilderink; E. Snilagyi; F. Passti; Paul Lambeck; T.J.A. Popma

doi:10.1109/LEOS.1995.484610

Reduction of hydrogen induced losses in PECVD-SiOxNy optical waveguides in the near infrared

H. Albers
, L.T.H. Hilderink
, E. Snilagyi
, F. Passti
, Paul Lambeck
, T.J.A. Popma

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

12 Citations (Scopus)

200 Downloads (Pure)

Abstract

The hydrogen in PECVD-SiOxNy was studied with IR spectroscopy and ERD analysis as a function of the O/N ratio and the annealing treatment up to 1150°C. The results were compared with measured spectral waveguide losses

Original language	Undefined
Title of host publication	LEOS '95, IEEE Lasers and electro-optics society 1995
Place of Publication	San Fransisco
Publisher	IEEE
Pages	88-89
DOIs	https://doi.org/10.1109/LEOS.1995.484610
Publication status	Published - 30 Oct 1995
Event	8th Annual Meeting of the Lasers and Electro-Optics Society (LEOS) 1995 - San Francisco, United States Duration: 30 Oct 1995 → 31 Oct 1995 Conference number: 8

Publication series

Name
Publisher	IEEE
Volume	2

Conference

Conference	8th Annual Meeting of the Lasers and Electro-Optics Society (LEOS) 1995
Country/Territory	United States
City	San Francisco
Period	30/10/95 → 31/10/95

Keywords

METIS-112750
IR-15868

Access to Document

10.1109/LEOS.1995.484610

Reduction_of_hydrogen_-_albers

Cite this

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title = "Reduction of hydrogen induced losses in PECVD-SiOxNy optical waveguides in the near infrared",

abstract = "The hydrogen in PECVD-SiOxNy was studied with IR spectroscopy and ERD analysis as a function of the O/N ratio and the annealing treatment up to 1150°C. The results were compared with measured spectral waveguide losses",

keywords = "METIS-112750, IR-15868",

author = "H. Albers and L.T.H. Hilderink and E. Snilagyi and F. Passti and Paul Lambeck and T.J.A. Popma",

year = "1995",

month = oct,

day = "30",

doi = "10.1109/LEOS.1995.484610",

language = "Undefined",

publisher = "IEEE",

pages = "88--89",

booktitle = "LEOS '95, IEEE Lasers and electro-optics society 1995",

address = "United States",

note = "8th Annual Meeting of the Lasers and Electro-Optics Society (LEOS) 1995 ; Conference date: 30-10-1995 Through 31-10-1995",

}

Albers, H, Hilderink, LTH, Snilagyi, E, Passti, F, Lambeck, P & Popma, TJA 1995, Reduction of hydrogen induced losses in PECVD-SiOxNy optical waveguides in the near infrared. in LEOS '95, IEEE Lasers and electro-optics society 1995. IEEE, San Fransisco, pp. 88-89, 8th Annual Meeting of the Lasers and Electro-Optics Society (LEOS) 1995, San Francisco, California, United States, 30/10/95. https://doi.org/10.1109/LEOS.1995.484610

TY - GEN

T1 - Reduction of hydrogen induced losses in PECVD-SiOxNy optical waveguides in the near infrared

AU - Albers, H.

AU - Hilderink, L.T.H.

AU - Snilagyi, E.

AU - Passti, F.

AU - Lambeck, Paul

AU - Popma, T.J.A.

N1 - Conference code: 8

PY - 1995/10/30

Y1 - 1995/10/30

N2 - The hydrogen in PECVD-SiOxNy was studied with IR spectroscopy and ERD analysis as a function of the O/N ratio and the annealing treatment up to 1150°C. The results were compared with measured spectral waveguide losses

AB - The hydrogen in PECVD-SiOxNy was studied with IR spectroscopy and ERD analysis as a function of the O/N ratio and the annealing treatment up to 1150°C. The results were compared with measured spectral waveguide losses

KW - METIS-112750

KW - IR-15868

U2 - 10.1109/LEOS.1995.484610

DO - 10.1109/LEOS.1995.484610

M3 - Conference contribution

SP - 88

EP - 89

BT - LEOS '95, IEEE Lasers and electro-optics society 1995

PB - IEEE

CY - San Fransisco

T2 - 8th Annual Meeting of the Lasers and Electro-Optics Society (LEOS) 1995

Y2 - 30 October 1995 through 31 October 1995

ER -