Reduction of interlayer thickness by low-temperature deposition of Mo/Si multilayer mirrors for X-ray reflection

V.I.T.A. de Rooij-Lohmann, Andrey Yakshin, E. Zoethout, J. Verhoeven, Frederik Bijkerk

Research output: Contribution to journalArticleAcademicpeer-review

11 Citations (Scopus)
Original languageEnglish
Pages (from-to)6251-6255
Number of pages5
JournalApplied surface science
Volume257
Issue number14
DOIs
Publication statusPublished - 2011

Keywords

  • METIS-277878

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