Reduction of surface roughness of a silicon chip for advanced nanocalorimetry

Luigi La Spina; Denis Ovchinnikov; Wim H.A. Wien; Alexander W. van Herwaarden; Egbert J.G. Goudena; Joachim Loos; Lis K. Nanver

doi:10.1016/j.sna.2008.02.010

Reduction of surface roughness of a silicon chip for advanced nanocalorimetry

Luigi La Spina^*, Denis Ovchinnikov, Wim H.A. Wien, Alexander W. van Herwaarden, Egbert J.G. Goudena, Joachim Loos, Lis K. Nanver

^*Corresponding author for this work

Research output: Contribution to journal › Article › Academic › peer-review

5 Citations (Scopus)

Abstract

A silicon chip designed to combine nanocalorimetry with scanning probe microscopy (SPM) has been realized. For the SPM application, as an additional requirement, a very low surface roughness of the scanned area becomes imperative. Several steps in the basic process flow are examined by atomic force microscopy (AFM) and modified in order to meet the surface roughness demands of a root mean square (rms) roughness below 1 nm as well as a negligible nanoparticle count. In particular, spin-on benzocyclobutene (BCB) layers are demonstrated to give a versatile means of achieving a surface that is smooth enough for calorimetry of nanometer-thin films while simultaneously allowing the investigation of nanometer scale morphological features by means of SPM.

Original language	English
Pages (from-to)	403-409
Number of pages	7
Journal	Sensors and Actuators A: Physical
Volume	144
Issue number	2
DOIs	https://doi.org/10.1016/j.sna.2008.02.010
Publication status	Published - 15 Jun 2008
Externally published	Yes

Keywords

Atomic force microscopy
Benzocyclobutene
Nanocalorimetry
Roughness
Thin films

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10.1016/j.sna.2008.02.010

Cite this

@article{8c04cca2c8d34637859167be1156bde2,

title = "Reduction of surface roughness of a silicon chip for advanced nanocalorimetry",

abstract = "A silicon chip designed to combine nanocalorimetry with scanning probe microscopy (SPM) has been realized. For the SPM application, as an additional requirement, a very low surface roughness of the scanned area becomes imperative. Several steps in the basic process flow are examined by atomic force microscopy (AFM) and modified in order to meet the surface roughness demands of a root mean square (rms) roughness below 1 nm as well as a negligible nanoparticle count. In particular, spin-on benzocyclobutene (BCB) layers are demonstrated to give a versatile means of achieving a surface that is smooth enough for calorimetry of nanometer-thin films while simultaneously allowing the investigation of nanometer scale morphological features by means of SPM.",

keywords = "Atomic force microscopy, Benzocyclobutene, Nanocalorimetry, Roughness, Thin films",

author = "{La Spina}, Luigi and Denis Ovchinnikov and Wien, {Wim H.A.} and {van Herwaarden}, {Alexander W.} and Goudena, {Egbert J.G.} and Joachim Loos and Nanver, {Lis K.}",

year = "2008",

month = jun,

day = "15",

doi = "10.1016/j.sna.2008.02.010",

language = "English",

volume = "144",

pages = "403--409",

journal = "Sensors and Actuators A: Physical",

issn = "0924-4247",

publisher = "Elsevier",

number = "2",

}

TY - JOUR

T1 - Reduction of surface roughness of a silicon chip for advanced nanocalorimetry

AU - La Spina, Luigi

AU - Ovchinnikov, Denis

AU - Wien, Wim H.A.

AU - van Herwaarden, Alexander W.

AU - Goudena, Egbert J.G.

AU - Loos, Joachim

AU - Nanver, Lis K.

PY - 2008/6/15

Y1 - 2008/6/15

N2 - A silicon chip designed to combine nanocalorimetry with scanning probe microscopy (SPM) has been realized. For the SPM application, as an additional requirement, a very low surface roughness of the scanned area becomes imperative. Several steps in the basic process flow are examined by atomic force microscopy (AFM) and modified in order to meet the surface roughness demands of a root mean square (rms) roughness below 1 nm as well as a negligible nanoparticle count. In particular, spin-on benzocyclobutene (BCB) layers are demonstrated to give a versatile means of achieving a surface that is smooth enough for calorimetry of nanometer-thin films while simultaneously allowing the investigation of nanometer scale morphological features by means of SPM.

AB - A silicon chip designed to combine nanocalorimetry with scanning probe microscopy (SPM) has been realized. For the SPM application, as an additional requirement, a very low surface roughness of the scanned area becomes imperative. Several steps in the basic process flow are examined by atomic force microscopy (AFM) and modified in order to meet the surface roughness demands of a root mean square (rms) roughness below 1 nm as well as a negligible nanoparticle count. In particular, spin-on benzocyclobutene (BCB) layers are demonstrated to give a versatile means of achieving a surface that is smooth enough for calorimetry of nanometer-thin films while simultaneously allowing the investigation of nanometer scale morphological features by means of SPM.

KW - Atomic force microscopy

KW - Benzocyclobutene

KW - Nanocalorimetry

KW - Roughness

KW - Thin films

UR - http://www.scopus.com/inward/record.url?scp=43749083011&partnerID=8YFLogxK

U2 - 10.1016/j.sna.2008.02.010

DO - 10.1016/j.sna.2008.02.010

M3 - Article

AN - SCOPUS:43749083011

SN - 0924-4247

VL - 144

SP - 403

EP - 409

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

IS - 2

ER -

Reduction of surface roughness of a silicon chip for advanced nanocalorimetry

Abstract

Keywords

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