Reduction of surface roughness of a silicon chip for advanced nanocalorimetry

Luigi La Spina*, Denis Ovchinnikov, Wim H.A. Wien, Alexander W. van Herwaarden, Egbert J.G. Goudena, Joachim Loos, Lis K. Nanver

*Corresponding author for this work

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)

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