Reflectance Tuning at Extreme Ultraviolet Wavelengths with Active Multilayer Mirrors

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Original languageEnglish
Title of host publicationProceedings of the Second Annual Meeting of the Smart Optics Systems Program
Editors Rufus Fraanje
Place of PublicationDelft
PublisherSTW
Pages1-36
Publication statusPublished - 12 Sep 2011

Keywords

  • METIS-278112

Cite this