reflective pyramid wavefront sensor for EUV radiation

Research output: Contribution to conference › Poster › Other research output

Original language	English
Pages	-
Publication status	Published - 9 Oct 2012
Event	36th NNV AMO Annual Meeting Lunteren 2012 - Lunteren, Netherlands Duration: 9 Oct 2012 → 10 Oct 2012

Conference	36th NNV AMO Annual Meeting Lunteren 2012
Country/Territory	Netherlands
City	Lunteren
Period	9/10/12 → 10/10/12

Keywords

@conference{fdc3c2749eb04600902a01f1a2c434ff,

title = "reflective pyramid wavefront sensor for EUV radiation",

keywords = "METIS-293973",

author = "Muharrem Bayraktar and {van Goor}, F.A. and Frederik Bijkerk and Boller, {Klaus J.}",

year = "2012",

month = oct,

day = "9",

language = "English",

pages = "--",

note = "36th NNV AMO Annual Meeting Lunteren 2012 ; Conference date: 09-10-2012 Through 10-10-2012",

}