Reflectivity of Mo/Si multilayer systems for EUVL

E. Louis^*, A. E. Yakshin, P. C. Gorts, S. Abdali, E. L G Maas, R. Stuik, F. Bijkerk, D. Schmitz, F. Scholze, G. Ulm, M. Haidl, Carl Zeiss

^*Corresponding author for this work

Research output: Contribution to journal › Conference article › Academic › peer-review