Reliability issues related to laser-annealed implanted back-wafer contacts in bipolar silicon-on-glass processes

G. Lorito*, V. Gonda, S. Liu, T.L.M. Scholtes, H. Schellevis, L.K. Nanver

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Reliability issues related to laser-annealed implanted back-wafer contacts in bipolar silicon-on-glass processes'. Together they form a unique fingerprint.

Material Science

Engineering