Reliable fabrication of low-loss Al2O3 waveguides for active integrated optics

F. Ay; Kerstin Worhoff; J. Bradley; Markus Pollnau

Reliable fabrication of low-loss Al₂O₃ waveguides for active integrated optics

F. Ay, Kerstin Worhoff, J. Bradley, Markus Pollnau

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

We developed an rf-based reactive co-sputtering process which resulted in uniform, reproducible deposition of low-loss $Al_{2}O_{3}$ waveguides. Due to their high optical quality these layers are promising host materials for rare-earth doped integrated optical devices.

Original language	Undefined
Title of host publication	2nd EPS-QEOD Europhoton Conference on Solid-State and Fiber Coherent Light Sources - Europhysics Conference Abstracts
Place of Publication	Mulhouse Cedex, France
Publisher	European Physical Society (EPS)
Pages	TuC2
Number of pages	1
ISBN (Print)	2-914771-41-X
Publication status	Published - 10 Sept 2006
Event	2nd EPS-QEOD EUROPHOTON Conference 2006: Solid-State and Fiber Coherent Light Sources - Pisa, Italy Duration: 10 Sept 2006 → 16 Sept 2006 Conference number: 2

Publication series

Name
Publisher	European Physical Society
Number	TuC2
Volume	30J

Conference

Conference	2nd EPS-QEOD EUROPHOTON Conference 2006
Abbreviated title	EUROPHOTON
Country/Territory	Italy
City	Pisa
Period	10/09/06 → 16/09/06

Keywords

EWI-8422
IR-66698
METIS-237715
IOMS-APD: Advanced Photonic Devices

Access to Document

Cite this

@inproceedings{ec2af5890a694021a78b84f88dd2636b,

title = "Reliable fabrication of low-loss Al2O3 waveguides for active integrated optics",

abstract = "We developed an rf-based reactive co-sputtering process which resulted in uniform, reproducible deposition of low-loss $Al_{2}O_{3}$ waveguides. Due to their high optical quality these layers are promising host materials for rare-earth doped integrated optical devices.",

keywords = "EWI-8422, IR-66698, METIS-237715, IOMS-APD: Advanced Photonic Devices",

author = "F. Ay and Kerstin Worhoff and J. Bradley and Markus Pollnau",

year = "2006",

month = sep,

day = "10",

language = "Undefined",

isbn = "2-914771-41-X",

publisher = "European Physical Society (EPS)",

number = "TuC2",

pages = "TuC2",

booktitle = "2nd EPS-QEOD Europhoton Conference on Solid-State and Fiber Coherent Light Sources - Europhysics Conference Abstracts",

address = "France",

note = "2nd EPS-QEOD EUROPHOTON Conference 2006 ; Conference date: 10-09-2006 Through 16-09-2006",

}

Ay, F, Worhoff, K, Bradley, J & Pollnau, M 2006, Reliable fabrication of low-loss Al₂O₃ waveguides for active integrated optics. in 2nd EPS-QEOD Europhoton Conference on Solid-State and Fiber Coherent Light Sources - Europhysics Conference Abstracts. European Physical Society (EPS), Mulhouse Cedex, France, pp. TuC2, 2nd EPS-QEOD EUROPHOTON Conference 2006, Pisa, Italy, 10/09/06.

Reliable fabrication of low-loss Al₂O₃ waveguides for active integrated optics. / Ay, F.; Worhoff, Kerstin; Bradley, J. et al.
2nd EPS-QEOD Europhoton Conference on Solid-State and Fiber Coherent Light Sources - Europhysics Conference Abstracts. Mulhouse Cedex, France: European Physical Society (EPS), 2006. p. TuC2.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Reliable fabrication of low-loss Al2O3 waveguides for active integrated optics

AU - Ay, F.

AU - Worhoff, Kerstin

AU - Bradley, J.

AU - Pollnau, Markus

N1 - Conference code: 2

PY - 2006/9/10

Y1 - 2006/9/10

N2 - We developed an rf-based reactive co-sputtering process which resulted in uniform, reproducible deposition of low-loss $Al_{2}O_{3}$ waveguides. Due to their high optical quality these layers are promising host materials for rare-earth doped integrated optical devices.

AB - We developed an rf-based reactive co-sputtering process which resulted in uniform, reproducible deposition of low-loss $Al_{2}O_{3}$ waveguides. Due to their high optical quality these layers are promising host materials for rare-earth doped integrated optical devices.

KW - EWI-8422

KW - IR-66698

KW - METIS-237715

KW - IOMS-APD: Advanced Photonic Devices

M3 - Conference contribution

SN - 2-914771-41-X

SP - TuC2

BT - 2nd EPS-QEOD Europhoton Conference on Solid-State and Fiber Coherent Light Sources - Europhysics Conference Abstracts

PB - European Physical Society (EPS)

CY - Mulhouse Cedex, France

T2 - 2nd EPS-QEOD EUROPHOTON Conference 2006

Y2 - 10 September 2006 through 16 September 2006

ER -