Reliable fabrication of low-loss Al2O3 waveguides for active integrated optics

F. Ay, Kerstin Worhoff, J. Bradley, Markus Pollnau

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    Abstract

    We developed an rf-based reactive co-sputtering process which resulted in uniform, reproducible deposition of low-loss $Al_{2}O_{3}$ waveguides. Due to their high optical quality these layers are promising host materials for rare-earth doped integrated optical devices.
    Original languageUndefined
    Title of host publication2nd EPS-QEOD Europhoton Conference on Solid-State and Fiber Coherent Light Sources - Europhysics Conference Abstracts
    Place of PublicationMulhouse Cedex, France
    PublisherEuropean Physical Society (EPS)
    PagesTuC2
    Number of pages1
    ISBN (Print)2-914771-41-X
    Publication statusPublished - 10 Sep 2006
    Event2nd EPS-QEOD EUROPHOTON Conference 2006: Solid-State and Fiber Coherent Light Sources - Pisa, Italy
    Duration: 10 Sep 200616 Sep 2006
    Conference number: 2

    Publication series

    Name
    PublisherEuropean Physical Society
    NumberTuC2
    Volume30J

    Conference

    Conference2nd EPS-QEOD EUROPHOTON Conference 2006
    Abbreviated titleEUROPHOTON
    CountryItaly
    CityPisa
    Period10/09/0616/09/06

    Keywords

    • EWI-8422
    • IR-66698
    • METIS-237715
    • IOMS-APD: Advanced Photonic Devices

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