Research and development of long pulse excimer lasers

L. Feenstra; Hubertus M.J. Bastiaens; F.A. van Goor; R.M. Hofstra; P.J.M. Peters; J.C.M. Timmermans; M.J. Zwegers; W.J. Witteman

Research and development of long pulse excimer lasers

L. Feenstra, Hubertus M.J. Bastiaens, F.A. van Goor, R.M. Hofstra, P.J.M. Peters, J.C.M. Timmermans, M.J. Zwegers, W.J. Witteman

Laser Physics & Nonlinear Optics

Research output: Other contribution › Other research output

Original language	Undefined
Place of Publication	Lunteren
Publication status	Published - 17 Mar 1998

Keywords

METIS-131469

Cite this

@misc{4ccfb0316c6e486a9af4095c77c5412b,

title = "Research and development of long pulse excimer lasers",

keywords = "METIS-131469",

author = "L. Feenstra and Bastiaens, {Hubertus M.J.} and {van Goor}, F.A. and R.M. Hofstra and P.J.M. Peters and J.C.M. Timmermans and M.J. Zwegers and W.J. Witteman",

year = "1998",

month = mar,

day = "17",

language = "Undefined",

type = "Other",

}