Research and development of long pulse excimer lasers

L. Feenstra, Hubertus M.J. Bastiaens, F.A. van Goor, R.M. Hofstra, P.J.M. Peters, J.C.M. Timmermans, M.J. Zwegers, W.J. Witteman

Research output: Other contributionOther research output

Original languageUndefined
Place of PublicationLunteren
Publication statusPublished - 17 Mar 1998

Keywords

  • METIS-131469

Cite this

Feenstra, L., Bastiaens, H. M. J., van Goor, F. A., Hofstra, R. M., Peters, P. J. M., Timmermans, J. C. M., ... Witteman, W. J. (1998, Mar 17). Research and development of long pulse excimer lasers. Lunteren.
Feenstra, L. ; Bastiaens, Hubertus M.J. ; van Goor, F.A. ; Hofstra, R.M. ; Peters, P.J.M. ; Timmermans, J.C.M. ; Zwegers, M.J. ; Witteman, W.J. / Research and development of long pulse excimer lasers. 1998. Lunteren.
@misc{4ccfb0316c6e486a9af4095c77c5412b,
title = "Research and development of long pulse excimer lasers",
keywords = "METIS-131469",
author = "L. Feenstra and Bastiaens, {Hubertus M.J.} and {van Goor}, F.A. and R.M. Hofstra and P.J.M. Peters and J.C.M. Timmermans and M.J. Zwegers and W.J. Witteman",
year = "1998",
month = "3",
day = "17",
language = "Undefined",
type = "Other",

}

Feenstra, L, Bastiaens, HMJ, van Goor, FA, Hofstra, RM, Peters, PJM, Timmermans, JCM, Zwegers, MJ & Witteman, WJ 1998, Research and development of long pulse excimer lasers. Lunteren.

Research and development of long pulse excimer lasers. / Feenstra, L.; Bastiaens, Hubertus M.J.; van Goor, F.A.; Hofstra, R.M.; Peters, P.J.M.; Timmermans, J.C.M.; Zwegers, M.J.; Witteman, W.J.

Lunteren. 1998, .

Research output: Other contributionOther research output

TY - GEN

T1 - Research and development of long pulse excimer lasers

AU - Feenstra, L.

AU - Bastiaens, Hubertus M.J.

AU - van Goor, F.A.

AU - Hofstra, R.M.

AU - Peters, P.J.M.

AU - Timmermans, J.C.M.

AU - Zwegers, M.J.

AU - Witteman, W.J.

PY - 1998/3/17

Y1 - 1998/3/17

KW - METIS-131469

M3 - Other contribution

CY - Lunteren

ER -

Feenstra L, Bastiaens HMJ, van Goor FA, Hofstra RM, Peters PJM, Timmermans JCM et al. Research and development of long pulse excimer lasers. 1998.