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Residual Stress Analysis of Thin Film Materials for Fabricating Suspended Low Stress Si3N4 Waveguides on Sapphire
Erwin Berenschot*, Simen Martinussen, Kai Wang, Sonia García-Blanco, Niels Tas, Roald Tiggelaar
*Corresponding author for this work
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
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