Residual stress and Young's modulus of pulsed laser deposited PZT thin films: Effect of thin film composition and crystal direction of Si cantilevers

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Abstract

We investigated the residual stress and Young's modulus of Pb(ZrxTi1 - x)O3 (PZT) thin films with a (110) preferred orientation and a composition x ranging from 0.2 to 0.8. The films are grown by pulsed laser deposition on silicon cantilevers aligned along the <110> and <100> silicon crystal directions. Changes in resonance frequency and static bending of the cantilevers are used to determine the Young's modulus and residual stress respectively. The Young's modulus was found to be in the range of 100-200 GPa. The residual stress is tensile and shows a sharp increase from about 50 to 250 MPa at a composition of x = 0.2 to 0.4. These mechanical parameters clearly depend on the cantilever orientation with respect to the silicon crystal, which we suspect to be linked to the epitaxial growth of the films. The variation in stress with composition can be explained by the difference in thermal expansion between silicon and PZT, if we assume an intrinsic stress of 200-300 MPa to be already present immediately after deposition. Strain calculated from X-ray diffraction data leads to unreasonably high residual stress values, at least one order of magnitude higher than measured by cantilever bending. © 2016 Elsevier B.V. All rights reserved.
Original languageUndefined
Pages (from-to)56-62
Number of pages7
JournalMicroelectronic engineering
Volume161
DOIs
Publication statusPublished - 1 Aug 2016

Keywords

  • EWI-26189
  • IR-100632
  • METIS-317195

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