Resistive actuator sensor structures for the determination of fluid and flow parameters - first results

J.J.J. van Baar, Remco J. Wiegerink, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of the 3rd symposium on Microsystems in practice
Place of Publication	Utrecht
Pages	-
Number of pages	6
Publication status	Published - 20 Jan 2000
Event	3rd Symposium on Microsystems in Practice - Utrecht, The Netherlands Duration: 20 Jan 2000 → 21 Jan 2000

Conference	3rd Symposium on Microsystems in Practice
Period	20/01/00 → 21/01/00
Other	January 20-21, 2000

Keywords

@inproceedings{1a92ba890e3b43b88e90edc24832edda,

title = "Resistive actuator sensor structures for the determination of fluid and flow parameters - first results",

keywords = "METIS-113069, IR-16184",

author = "{van Baar}, J.J.J. and Wiegerink, {Remco J.} and Krijnen, {Gijsbertus J.M.} and Elwenspoek, {Michael Curt}",

year = "2000",

month = jan,

day = "20",

language = "Undefined",

pages = "--",

booktitle = "Proceedings of the 3rd symposium on Microsystems in practice",

note = "3rd Symposium on Microsystems in Practice ; Conference date: 20-01-2000 Through 21-01-2000",

}

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Resistive actuator sensor structures for the determination of fluid and flow parameters - first results

AU - van Baar, J.J.J.

AU - Wiegerink, Remco J.

AU - Krijnen, Gijsbertus J.M.

AU - Elwenspoek, Michael Curt

PY - 2000/1/20

Y1 - 2000/1/20

KW - METIS-113069

KW - IR-16184

M3 - Conference contribution

SP - -

BT - Proceedings of the 3rd symposium on Microsystems in practice

CY - Utrecht

T2 - 3rd Symposium on Microsystems in Practice

Y2 - 20 January 2000 through 21 January 2000

ER -