Resistive actuator sensor structures for the determination of fluid and flow parameters - first results

J.J.J. van Baar, Remco J. Wiegerink, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of the 3rd symposium on Microsystems in practice
    Place of PublicationUtrecht
    Number of pages6
    Publication statusPublished - 20 Jan 2000
    Event3rd Symposium on Microsystems in Practice - Utrecht, The Netherlands
    Duration: 20 Jan 200021 Jan 2000


    Conference3rd Symposium on Microsystems in Practice
    OtherJanuary 20-21, 2000


    • METIS-113069
    • IR-16184

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