Resistive actuator sensor structures for the determination of fluid and flow parameters - first results

J.J.J. van Baar, Remco J. Wiegerink, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of the 3rd symposium on Microsystems in practice
Place of Publication	Utrecht
Pages	-
Number of pages	6
Publication status	Published - 20 Jan 2000

Keywords

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title = "Resistive actuator sensor structures for the determination of fluid and flow parameters - first results",

keywords = "METIS-113069, IR-16184",

author = "{van Baar}, J.J.J. and Wiegerink, {Remco J.} and Krijnen, {Gijsbertus J.M.} and Elwenspoek, {Michael Curt}",

year = "2000",

month = jan,

day = "20",

language = "Undefined",

pages = "--",

booktitle = "Proceedings of the 3rd symposium on Microsystems in practice",

}

Proceedings of the 3rd symposium on Microsystems in practice. Utrecht, 2000. p. -.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Resistive actuator sensor structures for the determination of fluid and flow parameters - first results

AU - van Baar, J.J.J.

AU - Wiegerink, Remco J.

AU - Krijnen, Gijsbertus J.M.

AU - Elwenspoek, Michael Curt

PY - 2000/1/20

Y1 - 2000/1/20

KW - METIS-113069

KW - IR-16184

M3 - Conference contribution

SP - -

BT - Proceedings of the 3rd symposium on Microsystems in practice

CY - Utrecht

ER -