Resistive actuator sensor structures for the determination of fluid and flow parameters - first results

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageUndefined
Title of host publicationProceedings of the 3rd symposium on Microsystems in practice
Place of PublicationUtrecht
Pages-
Number of pages6
Publication statusPublished - 20 Jan 2000

Keywords

  • METIS-113069
  • IR-16184

Cite this

van Baar, J. J. J., Wiegerink, R. J., Krijnen, G. J. M., & Elwenspoek, M. C. (2000). Resistive actuator sensor structures for the determination of fluid and flow parameters - first results. In Proceedings of the 3rd symposium on Microsystems in practice (pp. -). Utrecht.
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author = "{van Baar}, J.J.J. and Wiegerink, {Remco J.} and Krijnen, {Gijsbertus J.M.} and Elwenspoek, {Michael Curt}",
year = "2000",
month = "1",
day = "20",
language = "Undefined",
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booktitle = "Proceedings of the 3rd symposium on Microsystems in practice",

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van Baar, JJJ, Wiegerink, RJ, Krijnen, GJM & Elwenspoek, MC 2000, Resistive actuator sensor structures for the determination of fluid and flow parameters - first results. in Proceedings of the 3rd symposium on Microsystems in practice. Utrecht, pp. -.

Resistive actuator sensor structures for the determination of fluid and flow parameters - first results. / van Baar, J.J.J.; Wiegerink, Remco J.; Krijnen, Gijsbertus J.M.; Elwenspoek, Michael Curt.

Proceedings of the 3rd symposium on Microsystems in practice. Utrecht, 2000. p. -.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Resistive actuator sensor structures for the determination of fluid and flow parameters - first results

AU - van Baar, J.J.J.

AU - Wiegerink, Remco J.

AU - Krijnen, Gijsbertus J.M.

AU - Elwenspoek, Michael Curt

PY - 2000/1/20

Y1 - 2000/1/20

KW - METIS-113069

KW - IR-16184

M3 - Conference contribution

SP - -

BT - Proceedings of the 3rd symposium on Microsystems in practice

CY - Utrecht

ER -

van Baar JJJ, Wiegerink RJ, Krijnen GJM, Elwenspoek MC. Resistive actuator sensor structures for the determination of fluid and flow parameters - first results. In Proceedings of the 3rd symposium on Microsystems in practice. Utrecht. 2000. p. -