Resistive actuator sensor structures for the determination of fluid and flow parameters - first results

J.J.J. van Baar, Remco J. Wiegerink, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of the 3rd symposium on Microsystems in practice
    Place of PublicationUtrecht
    Pages-
    Number of pages6
    Publication statusPublished - 20 Jan 2000

    Keywords

    • METIS-113069
    • IR-16184

    Cite this

    van Baar, J. J. J., Wiegerink, R. J., Krijnen, G. J. M., & Elwenspoek, M. C. (2000). Resistive actuator sensor structures for the determination of fluid and flow parameters - first results. In Proceedings of the 3rd symposium on Microsystems in practice (pp. -). Utrecht.