Resistive pressure sensors integrated with a Coriolis mass flow sensor

Dennis  Alveringh; Thomas Schut; Remco J. Wiegerink; Wouter  Sparreboom; Joost Conrad Lötters

doi:10.1109/TRANSDUCERS.2017.7994261

Resistive pressure sensors integrated with a Coriolis mass flow sensor

Dennis Alveringh, Thomas Schut, Remco J. Wiegerink, Wouter Sparreboom, Joost Conrad Lötters

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

10 Citations (Scopus)

102 Downloads (Pure)

Abstract

We report on a novel resistive pressure sensor that is completely integrated with a Coriolis mass flow sensor on one chip, without the need for extra fabrication steps or different materials. Two pressure sensors are placed in-line with the Coriolis sensor without requiring any changes to the fluid path. This enables the measurement over the pressure drop of the Coriolis mass flow sensor and ΔP flow sensing. By combining this pressure drop with the output signal of the Coriolis mass flow sensor, real-time viscosity characterization is also possible. Since the pressure sensor consists of a Wheatstone bridge, no complex interfacing electronics are needed. The first characterization of the sensor shows a linear sensitivity of 4 μV/bar for a pressure range from 0 bar to 1 bar.

Original language	English
Title of host publication	TRANSDUCERS 2017
Subtitle of host publication	19th International Conference on Solid-State Sensors, Actuators and Microsystems
Publisher	IEEE
Pages	1167-1170
Number of pages	4
ISBN (Electronic)	978-1-5386-2732-7
ISBN (Print)	978-1-5386-2733-4
DOIs	https://doi.org/10.1109/TRANSDUCERS.2017.7994261
Publication status	Published - 18 Jun 2017
Event	19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan Duration: 18 Jun 2017 → 22 Jun 2017 Conference number: 19 http://transducers2017.org/

Conference

Conference	19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
Abbreviated title	TRANSDUCERS
Country/Territory	Taiwan
City	Kaohsiung
Period	18/06/17 → 22/06/17
Internet address	http://transducers2017.org/

Keywords

Pressure sensor
Coriolis mass flow sensor
Multi parameter system
Viscosity sensor
Density sensor
Surface Channel Technology (SCT)
22/3 OA procedure

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10.1109/TRANSDUCERS.2017.7994261

Alveringh2017resistiveFinal published version, 826 KBLicence: Taverne

Cite this

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title = "Resistive pressure sensors integrated with a Coriolis mass flow sensor",

abstract = "We report on a novel resistive pressure sensor that is completely integrated with a Coriolis mass flow sensor on one chip, without the need for extra fabrication steps or different materials. Two pressure sensors are placed in-line with the Coriolis sensor without requiring any changes to the fluid path. This enables the measurement over the pressure drop of the Coriolis mass flow sensor and ΔP flow sensing. By combining this pressure drop with the output signal of the Coriolis mass flow sensor, real-time viscosity characterization is also possible. Since the pressure sensor consists of a Wheatstone bridge, no complex interfacing electronics are needed. The first characterization of the sensor shows a linear sensitivity of 4 μV/bar for a pressure range from 0 bar to 1 bar.",

keywords = "Pressure sensor, Coriolis mass flow sensor, Multi parameter system, Viscosity sensor, Density sensor, Surface Channel Technology (SCT), 22/3 OA procedure",

author = "Dennis Alveringh and Thomas Schut and Wiegerink, {Remco J.} and Wouter Sparreboom and L{\"o}tters, {Joost Conrad}",

year = "2017",

month = jun,

day = "18",

doi = "10.1109/TRANSDUCERS.2017.7994261",

language = "English",

isbn = "978-1-5386-2733-4",

pages = "1167--1170",

booktitle = "TRANSDUCERS 2017",

publisher = "IEEE",

address = "United States",

note = "19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017, TRANSDUCERS ; Conference date: 18-06-2017 Through 22-06-2017",

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}

Alveringh, D, Schut, T, Wiegerink, RJ , Sparreboom, W & Lötters, JC 2017, Resistive pressure sensors integrated with a Coriolis mass flow sensor. in TRANSDUCERS 2017: 19th International Conference on Solid-State Sensors, Actuators and Microsystems. IEEE, pp. 1167-1170, 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017, Kaohsiung, Taiwan, 18/06/17. https://doi.org/10.1109/TRANSDUCERS.2017.7994261

Resistive pressure sensors integrated with a Coriolis mass flow sensor. / Alveringh, Dennis ; Schut, Thomas; Wiegerink, Remco J. et al.
TRANSDUCERS 2017: 19th International Conference on Solid-State Sensors, Actuators and Microsystems. IEEE, 2017. p. 1167-1170.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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T1 - Resistive pressure sensors integrated with a Coriolis mass flow sensor

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AU - Sparreboom, Wouter

AU - Lötters, Joost Conrad

N1 - Conference code: 19

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N2 - We report on a novel resistive pressure sensor that is completely integrated with a Coriolis mass flow sensor on one chip, without the need for extra fabrication steps or different materials. Two pressure sensors are placed in-line with the Coriolis sensor without requiring any changes to the fluid path. This enables the measurement over the pressure drop of the Coriolis mass flow sensor and ΔP flow sensing. By combining this pressure drop with the output signal of the Coriolis mass flow sensor, real-time viscosity characterization is also possible. Since the pressure sensor consists of a Wheatstone bridge, no complex interfacing electronics are needed. The first characterization of the sensor shows a linear sensitivity of 4 μV/bar for a pressure range from 0 bar to 1 bar.

AB - We report on a novel resistive pressure sensor that is completely integrated with a Coriolis mass flow sensor on one chip, without the need for extra fabrication steps or different materials. Two pressure sensors are placed in-line with the Coriolis sensor without requiring any changes to the fluid path. This enables the measurement over the pressure drop of the Coriolis mass flow sensor and ΔP flow sensing. By combining this pressure drop with the output signal of the Coriolis mass flow sensor, real-time viscosity characterization is also possible. Since the pressure sensor consists of a Wheatstone bridge, no complex interfacing electronics are needed. The first characterization of the sensor shows a linear sensitivity of 4 μV/bar for a pressure range from 0 bar to 1 bar.

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KW - Multi parameter system

KW - Viscosity sensor

KW - Density sensor

KW - Surface Channel Technology (SCT)

KW - 22/3 OA procedure

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M3 - Conference contribution

SN - 978-1-5386-2733-4

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Y2 - 18 June 2017 through 22 June 2017

ER -

Resistive pressure sensors integrated with a Coriolis mass flow sensor

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Conference

Keywords

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