Resistive pressure sensors integrated with a Coriolis mass flow sensor

Dennis Alveringh, Thomas Schut, Remco J. Wiegerink, Wouter Sparreboom, Joost Conrad Lötters

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)

Abstract

We report on a novel resistive pressure sensor that is completely integrated with a Coriolis mass flow sensor on one chip, without the need for extra fabrication steps or different materials. Two pressure sensors are placed in-line with the Coriolis sensor without requiring any changes to the fluid path. This enables the measurement over the pressure drop of the Coriolis mass flow sensor and ΔP flow sensing. By combining this pressure drop with the output signal of the Coriolis mass flow sensor, real-time viscosity characterization is also possible. Since the pressure sensor consists of a Wheatstone bridge, no complex interfacing electronics are needed. The first characterization of the sensor shows a linear sensitivity of 4 μV/bar for a pressure range from 0 bar to 1 bar.
Original languageEnglish
Title of host publicationTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
PublisherIEEE
Pages1167-1170
Number of pages4
ISBN (Electronic)978-1-5386-2732-7
ISBN (Print)978-1-5386-2733-4
DOIs
Publication statusPublished - 18 Jun 2017
Event19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China
Duration: 18 Jun 201722 Jun 2017
Conference number: 19
http://transducers2017.org/

Conference

Conference19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
Abbreviated titleTRANSDUCERS
CountryTaiwan, Province of China
CityKaohsiung
Period18/06/1722/06/17
Internet address

Fingerprint

Pressure sensors
Sensors
Pressure drop
Electronic equipment
Viscosity
Fabrication
Fluids

Keywords

  • Pressure sensor
  • Coriolis mass flow sensor
  • multi parameter system
  • viscosity sensor
  • density sensor
  • surface channel technology

Cite this

Alveringh, D., Schut, T., Wiegerink, R. J., Sparreboom, W., & Lötters, J. C. (2017). Resistive pressure sensors integrated with a Coriolis mass flow sensor. In TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 1167-1170). IEEE. https://doi.org/10.1109/TRANSDUCERS.2017.7994261
Alveringh, Dennis ; Schut, Thomas ; Wiegerink, Remco J. ; Sparreboom, Wouter ; Lötters, Joost Conrad. / Resistive pressure sensors integrated with a Coriolis mass flow sensor. TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. IEEE, 2017. pp. 1167-1170
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abstract = "We report on a novel resistive pressure sensor that is completely integrated with a Coriolis mass flow sensor on one chip, without the need for extra fabrication steps or different materials. Two pressure sensors are placed in-line with the Coriolis sensor without requiring any changes to the fluid path. This enables the measurement over the pressure drop of the Coriolis mass flow sensor and ΔP flow sensing. By combining this pressure drop with the output signal of the Coriolis mass flow sensor, real-time viscosity characterization is also possible. Since the pressure sensor consists of a Wheatstone bridge, no complex interfacing electronics are needed. The first characterization of the sensor shows a linear sensitivity of 4 μV/bar for a pressure range from 0 bar to 1 bar.",
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Alveringh, D, Schut, T, Wiegerink, RJ, Sparreboom, W & Lötters, JC 2017, Resistive pressure sensors integrated with a Coriolis mass flow sensor. in TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. IEEE, pp. 1167-1170, 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017, Kaohsiung, Taiwan, Province of China, 18/06/17. https://doi.org/10.1109/TRANSDUCERS.2017.7994261

Resistive pressure sensors integrated with a Coriolis mass flow sensor. / Alveringh, Dennis ; Schut, Thomas; Wiegerink, Remco J.; Sparreboom, Wouter ; Lötters, Joost Conrad.

TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. IEEE, 2017. p. 1167-1170.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Alveringh D, Schut T, Wiegerink RJ, Sparreboom W, Lötters JC. Resistive pressure sensors integrated with a Coriolis mass flow sensor. In TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. IEEE. 2017. p. 1167-1170 https://doi.org/10.1109/TRANSDUCERS.2017.7994261