Resistive pressure sensors integrated with a Coriolis mass flow sensor

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    Abstract

    We report on a novel resistive pressure sensor that is completely integrated with a Coriolis mass flow sensor on one chip, without the need for extra fabrication steps or different materials. Two pressure sensors are placed in-line with the Coriolis sensor without requiring any changes to the fluid path. This enables the measurement over the pressure drop of the Coriolis mass flow sensor and ΔP flow sensing. By combining this pressure drop with the output signal of the Coriolis mass flow sensor, real-time viscosity characterization is also possible. Since the pressure sensor consists of a Wheatstone bridge, no complex interfacing electronics are needed. The first characterization of the sensor shows a linear sensitivity of 4 μV/bar for a pressure range from 0 bar to 1 bar.
    Original languageEnglish
    Title of host publicationTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
    PublisherIEEE
    Pages1167-1170
    Number of pages4
    ISBN (Electronic)978-1-5386-2732-7
    ISBN (Print)978-1-5386-2733-4
    DOIs
    Publication statusPublished - 18 Jun 2017
    Event19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China
    Duration: 18 Jun 201722 Jun 2017
    Conference number: 19
    http://transducers2017.org/

    Conference

    Conference19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
    Abbreviated titleTRANSDUCERS
    CountryTaiwan, Province of China
    CityKaohsiung
    Period18/06/1722/06/17
    Internet address

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    Keywords

    • Pressure sensor
    • Coriolis mass flow sensor
    • multi parameter system
    • viscosity sensor
    • density sensor
    • surface channel technology

    Cite this

    Alveringh, D., Schut, T., Wiegerink, R. J., Sparreboom, W., & Lötters, J. C. (2017). Resistive pressure sensors integrated with a Coriolis mass flow sensor. In TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 1167-1170). IEEE. https://doi.org/10.1109/TRANSDUCERS.2017.7994261