Resistless patterning of sub-micron structures by evaporation through nanostencils

J.P. Brugger, Johan W. Berenschot, S. Kuiper, W. Nijdam, A.M. Otter, Michael Curt Elwenspoek

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationRome, Italy
    Publication statusPublished - 21 Sep 1999

    Keywords

    • METIS-114807

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