Resistless patterning of sub-micron structures by evaporation through nanostencils

J.P. Brugger, Johan W. Berenschot, S. Kuiper, W. Nijdam, A.M. Otter, Michael Curt Elwenspoek

Research output: Other contribution › Other research output

Keywords

@misc{40dc3a887a94412fa1ffffe2140a293a,

title = "Resistless patterning of sub-micron structures by evaporation through nanostencils",

keywords = "METIS-114807",

author = "J.P. Brugger and Berenschot, {Johan W.} and S. Kuiper and W. Nijdam and A.M. Otter and Elwenspoek, {Michael Curt}",

year = "1999",

month = sep,

day = "21",

language = "Undefined",

type = "Other",

}