Resistless patterning of sub-micron structures by evaporation through nanostencils

J.P. Brugger, Johan W. Berenschot, S. Kuiper, W. Nijdam, A.M. Otter, Michael Curt Elwenspoek

    Research output: Contribution to journalArticleAcademicpeer-review

    135 Citations (Scopus)

    Fingerprint

    Dive into the research topics of 'Resistless patterning of sub-micron structures by evaporation through nanostencils'. Together they form a unique fingerprint.