Resonant diaphragm pressure measurement system with ZnO on Si excitation

J.G. Smits, H.A.C. Tilmans, K. Hoen, H. Mulder, J. van Vuuren, G. Boom

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The principle of measuring pressure by means of a resonant diaphragm has been studied. An oscillator consisting of an integrated amplifier with a piezoelectrically driven diaphragm in its feedback loop has been built. The oscillator frequency is accurately proportional to the square of the pressure in the range of 60 to 130 Torr. The frequency range is 1324 to 1336 Hz (this range being limited by a spurious mode which could be suppressed by better processing) for a 25 mm diameter diaphragm made of a silicon wafer and with PZT ceramics as driver and receptor. We have made an integrated version (1 × 1 mm2) of a square resonant diaphragm pressure guage by selective etching of (1 0 0) planes with ethylenediamine. The piezoelectric driving materials was sputtered zinc oxide. A driver was deposited midway between the bending point and the point of greatest curvature. A receptor was located at a symmetrical position to give a optimum transfer condition. The integrated current amplifier had a low impedance differential input stage, two gain cells and a high impedance output stage. These electrical conditions ensured maximum elastic freedom of the diaphragm. A digital circuit in I2L technology has been designed and made with eight-bit parallel read out of the frequency. This circuit may be directly connected to a microprocessor. The whole system contains the sensor chip, the analog amplifier chip and the digital chip, all in compatible technology.
Original languageEnglish
Pages (from-to)565-571
JournalSensors and actuators
Publication statusPublished - 1983


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