Resonating microbridge mass flow sensor

Siebe Bouwstra; Rob Legtenberg; Harrie A.C. Tilmans; Miko Elwenspoek

doi:10.1016/0924-4247(90)85066-D

Resonating microbridge mass flow sensor

Siebe Bouwstra, Rob Legtenberg, Harrie A.C. Tilmans, Miko Elwenspoek

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Abstract

A resonating microbridge mass flow sensor with a frequency output is presented, based on standard IC and thin-film technologies, and on front-side anisotropic etching. The operation, realization, theory and experiments are described. The sensitivity is compared with that of a resonating membrane prototype. Preliminary results show a base resonance frequency of 85 kHz at a temperature elevation of the microbridge of 20 °C, with a shift of 0.8 kHz in the mass flow range from 0 to 10 sccm.

Original language	English
Pages (from-to)	332-335
Number of pages	3
Journal	Sensors and Actuators A: Physical
Volume	21
Issue number	1-3
DOIs	https://doi.org/10.1016/0924-4247(90)85066-D
Publication status	Published - Feb 1990
Event	5th International Conference on Solid-State Sensors and Actuators and Eurosensors III, Transducers '90 - Eurosensors III - Montreux, Switzerland Duration: 25 Jun 1989 → 30 Jun 1989 Conference number: 5

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title = "Resonating microbridge mass flow sensor",

abstract = "A resonating microbridge mass flow sensor with a frequency output is presented, based on standard IC and thin-film technologies, and on front-side anisotropic etching. The operation, realization, theory and experiments are described. The sensitivity is compared with that of a resonating membrane prototype. Preliminary results show a base resonance frequency of 85 kHz at a temperature elevation of the microbridge of 20 °C, with a shift of 0.8 kHz in the mass flow range from 0 to 10 sccm.",

author = "Siebe Bouwstra and Rob Legtenberg and Tilmans, {Harrie A.C.} and Miko Elwenspoek",

year = "1990",

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AU - Bouwstra, Siebe

AU - Legtenberg, Rob

AU - Tilmans, Harrie A.C.

AU - Elwenspoek, Miko

N1 - Conference code: 5

PY - 1990/2

Y1 - 1990/2

N2 - A resonating microbridge mass flow sensor with a frequency output is presented, based on standard IC and thin-film technologies, and on front-side anisotropic etching. The operation, realization, theory and experiments are described. The sensitivity is compared with that of a resonating membrane prototype. Preliminary results show a base resonance frequency of 85 kHz at a temperature elevation of the microbridge of 20 °C, with a shift of 0.8 kHz in the mass flow range from 0 to 10 sccm.

AB - A resonating microbridge mass flow sensor with a frequency output is presented, based on standard IC and thin-film technologies, and on front-side anisotropic etching. The operation, realization, theory and experiments are described. The sensitivity is compared with that of a resonating membrane prototype. Preliminary results show a base resonance frequency of 85 kHz at a temperature elevation of the microbridge of 20 °C, with a shift of 0.8 kHz in the mass flow range from 0 to 10 sccm.

U2 - 10.1016/0924-4247(90)85066-D

DO - 10.1016/0924-4247(90)85066-D

M3 - Article

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VL - 21

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EP - 335

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

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T2 - 5th International Conference on Solid-State Sensors and Actuators and Eurosensors III, Transducers '90 - Eurosensors III

Y2 - 25 June 1989 through 30 June 1989

ER -

Resonating microbridge mass flow sensor

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