A resonating microbridge mass flow sensor with a frequency output is presented, based on standard IC and thin-film technologies, and on front-side anisotropic etching. The operation, realization, theory and experiments are described. The sensitivity is compared with that of a resonating membrane prototype. Preliminary results show a base resonance frequency of 85 kHz at a temperature elevation of the microbridge of 20 °C, with a shift of 0.8 kHz in the mass flow range from 0 to 10 sccm.
|Number of pages||3|
|Journal||Sensors and actuators. A: Physical|
|Publication status||Published - Feb 1990|
|Event||5th International Conference on Solid-State Sensors and Actuators and Eurosensors III, Transducers '90 - Eurosensors III - Montreux, Switzerland|
Duration: 25 Jun 1989 → 30 Jun 1989
Conference number: 5