Resonating microbridge mass flow sensor

Siebe Bouwstra, Rob Legtenberg, Harrie A.C. Tilmans, Miko Elwenspoek

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    Abstract

    A resonating microbridge mass flow sensor with a frequency output is presented, based on standard IC and thin-film technologies, and on front-side anisotropic etching. The operation, realization, theory and experiments are described. The sensitivity is compared with that of a resonating membrane prototype. Preliminary results show a base resonance frequency of 85 kHz at a temperature elevation of the microbridge of 20 °C, with a shift of 0.8 kHz in the mass flow range from 0 to 10 sccm.
    Original languageEnglish
    Pages (from-to)332-335
    Number of pages3
    JournalSensors and actuators. A: Physical
    Volume21
    Issue number1-3
    DOIs
    Publication statusPublished - Feb 1990
    Event5th International Conference on Solid-State Sensors and Actuators and Eurosensors III, Transducers '90 - Eurosensors III - Montreux, Switzerland
    Duration: 25 Jun 198930 Jun 1989
    Conference number: 5

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