Resonating microbridge mass-flow sensor with low-temperature-bonded cap wafer

R. Legtenberg, S. Bouwstra, J.H.J. Fluitman

    Research output: Contribution to conferencePoster

    Original languageEnglish
    Pages-
    Publication statusPublished - 1 Oct 1990
    Event4th European Conference on Solid-State Transducers, Eurosensors 1990 - Karlsruhe, Germany
    Duration: 1 Oct 19903 Oct 1990
    Conference number: 4

    Conference

    Conference4th European Conference on Solid-State Transducers, Eurosensors 1990
    Abbreviated titleEurosensors
    CountryGermany
    CityKarlsruhe
    Period1/10/903/10/90

    Keywords

    • METIS-133520

    Cite this

    Legtenberg, R., Bouwstra, S., & Fluitman, J. H. J. (1990). Resonating microbridge mass-flow sensor with low-temperature-bonded cap wafer. -. Poster session presented at 4th European Conference on Solid-State Transducers, Eurosensors 1990, Karlsruhe, Germany.