Resonating microbridge mass-flow sensor with low-temperature-bonded cap wafer

R. Legtenberg, S. Bouwstra, J.H.J. Fluitman

    Research output: Contribution to conferencePoster

    Original languageEnglish
    Pages-
    Publication statusPublished - 1 Oct 1990
    Event4th European Conference on Solid-State Transducers, Eurosensors IV - Karlsruhe, Germany
    Duration: 1 Oct 19903 Oct 1990
    Conference number: 4

    Conference

    Conference4th European Conference on Solid-State Transducers, Eurosensors IV
    Abbreviated titleEurosensors
    CountryGermany
    CityKarlsruhe
    Period1/10/903/10/90

    Keywords

    • METIS-133520

    Cite this

    Legtenberg, R., Bouwstra, S., & Fluitman, J. H. J. (1990). Resonating microbridge mass-flow sensor with low-temperature-bonded cap wafer. -. Poster session presented at 4th European Conference on Solid-State Transducers, Eurosensors IV, Karlsruhe, Germany.
    Legtenberg, R. ; Bouwstra, S. ; Fluitman, J.H.J. / Resonating microbridge mass-flow sensor with low-temperature-bonded cap wafer. Poster session presented at 4th European Conference on Solid-State Transducers, Eurosensors IV, Karlsruhe, Germany.
    @conference{d86e6b1760a8495983516dff61d88318,
    title = "Resonating microbridge mass-flow sensor with low-temperature-bonded cap wafer",
    keywords = "METIS-133520",
    author = "R. Legtenberg and S. Bouwstra and J.H.J. Fluitman",
    year = "1990",
    month = "10",
    day = "1",
    language = "English",
    pages = "--",
    note = "4th European Conference on Solid-State Transducers, Eurosensors IV, Eurosensors ; Conference date: 01-10-1990 Through 03-10-1990",

    }

    Legtenberg, R, Bouwstra, S & Fluitman, JHJ 1990, 'Resonating microbridge mass-flow sensor with low-temperature-bonded cap wafer' 4th European Conference on Solid-State Transducers, Eurosensors IV, Karlsruhe, Germany, 1/10/90 - 3/10/90, pp. -.

    Resonating microbridge mass-flow sensor with low-temperature-bonded cap wafer. / Legtenberg, R.; Bouwstra, S.; Fluitman, J.H.J.

    1990. - Poster session presented at 4th European Conference on Solid-State Transducers, Eurosensors IV, Karlsruhe, Germany.

    Research output: Contribution to conferencePoster

    TY - CONF

    T1 - Resonating microbridge mass-flow sensor with low-temperature-bonded cap wafer

    AU - Legtenberg, R.

    AU - Bouwstra, S.

    AU - Fluitman, J.H.J.

    PY - 1990/10/1

    Y1 - 1990/10/1

    KW - METIS-133520

    M3 - Poster

    SP - -

    ER -

    Legtenberg R, Bouwstra S, Fluitman JHJ. Resonating microbridge mass-flow sensor with low-temperature-bonded cap wafer. 1990. Poster session presented at 4th European Conference on Solid-State Transducers, Eurosensors IV, Karlsruhe, Germany.