Resonating microbridge mass flow sensor with low-temperature glass-bonded cap wafer

R. Legtenberg, S. Bouwstra, J.H.J. Fluitman

    Research output: Contribution to journalArticleAcademicpeer-review

    Original languageUndefined
    Pages (from-to)723-727
    Number of pages5
    JournalSensors and actuators. A: Physical
    Volume1994
    Publication statusPublished - 1994

    Keywords

    • METIS-111591

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