Resonating microbridge mass flow sensor with low-temperature glass-bonded cap wafer

R. Legtenberg, S. Bouwstra, J.H.J. Fluitman

Research output: Contribution to journal › Article › Academic › peer-review

Original language	Undefined
Pages (from-to)	723-727
Number of pages	5
Journal	Sensors and Actuators A: Physical
Volume	1994
Publication status	Published - 1994

Keywords

@article{f46d6f0f50e24835937d7e7b67971863,

title = "Resonating microbridge mass flow sensor with low-temperature glass-bonded cap wafer",

keywords = "METIS-111591",

author = "R. Legtenberg and S. Bouwstra and J.H.J. Fluitman",

year = "1994",

language = "Undefined",

volume = "1994",

pages = "723--727",

journal = "Sensors and Actuators A: Physical",

issn = "0924-4247",

publisher = "Elsevier",

}