Resonating microbridge mass flow sensor with low-temperature glass-bonded cap wafer

Rob Legtenberg, Siebe Bouwstra, J.H.J. Fluitman

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    Abstract

    A resonating microbridge mass flow sensor has been realized suspended inside a micro flow channel. Thin-film technologies and micromachining are used for the fabrication of the sensor wafer and a cap wafer with opposing V-grooves. A low-temperature glass-bonding technique is used to assemble the wafers allowing for feedthrough of the electrical connections. Measurements show sensitivities of the resonance frequency of several kHz per sccm nitrogen gas flows at average temperature elevations of the microbridge in the range 20 to 100°C.
    Original languageEnglish
    Pages (from-to)723-727
    Number of pages5
    JournalSensors and actuators. A: Physical
    Volume27
    Issue number1-3
    DOIs
    Publication statusPublished - May 1991

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