Resonating microbridge mass flow sensor with low-temperature glass-bonded cap wafer

Rob Legtenberg, Siebe Bouwstra, J.H.J. Fluitman

    Research output: Contribution to journal › Article › Academic › peer-review

    13 Citations (Scopus)
    117 Downloads (Pure)

    Fingerprint

    Dive into the research topics of 'Resonating microbridge mass flow sensor with low-temperature glass-bonded cap wafer'. Together they form a unique fingerprint.

    Engineering

    Physics

    Material Science