Response time of silicon photodiodes for DUV/EUV radiation

Sha Xia*, Francesco Sarubi, Rik Naulaerts, Stoyan Nihtianov, Lis Nanver

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

5 Citations (Scopus)

Abstract

There is a strong relation between the size, the shape and the location of the illuminated part of a shallow-junction photodiode, and its series resistance [2, 3, 4]. This relation creates an expectation for a big variation of the response time (the time for which the photo-generated charge will be removed from the photodiode) with the illuminated spot size. This is because the time constant of the photodiode, which is one of the main factors defining the response time, is a product of the series resistance multiplied by the junction capacitance. In this work the dependence of the charge removal time of a shallow photodiode on the size of the illuminated area, is studied. Simulation results, as well as measurement data, show that the response time is changing only slightly with the position and the size of the illuminated spot size, when very short light pulses are used. After the incidence light is over, the discharging of the photodiode continues with a time constant, which is highly independent of the size and the location of the illuminated part of the photodiode.

Original languageEnglish
Title of host publication2008 IEEE International Instrumentation and Measurement Technology Conference Proceedings, I2MTC
PublisherIEEE
Pages1956-1959
Number of pages4
ISBN (Electronic)978-1-4244-1541-0
ISBN (Print)978-1-4244-1540-3
DOIs
Publication statusPublished - 15 Sep 2008
Externally publishedYes
Event2008 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2008 - Fairmont Empress Hotel & Conference Center, Victoria, Canada
Duration: 12 May 200815 May 2008

Publication series

NameIEEE Instrumentation and Measurement Technology Conference. Conference Proceedings
ISSN (Print)1091-5281

Conference

Conference2008 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2008
Abbreviated titleI2MTC
CountryCanada
CityVictoria
Period12/05/0815/05/08

Keywords

  • Deep ultraviolet/extreme ultraviolet
  • Radiation detector
  • Response time
  • Series resistance

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