Review of excitation and detection mechanisms for micromechanical resonators

A. Prak, Theodorus S.J. Lammerink, J.H.J. Fluitman

Research output: Contribution to journal › Article › Academic › peer-review

Keywords

@article{77c3486970d74b97b982196848b0b713,

title = "Review of excitation and detection mechanisms for micromechanical resonators",

keywords = "METIS-112118",

author = "A. Prak and Lammerink, {Theodorus S.J.} and J.H.J. Fluitman",

year = "1993",

language = "Undefined",

pages = "143--181",

journal = "Sensors and materials",

issn = "0914-4935",

publisher = "M Y U Scientific Publishing Division",

number = "5:3",

}