Review of excitation and detection mechanisms for micromechanical resonators

A. Prak, Theodorus S.J. Lammerink, J.H.J. Fluitman

    Research output: Contribution to journalArticleAcademicpeer-review

    Original languageUndefined
    Pages (from-to)143-181
    JournalSensors and materials
    Issue number5:3
    Publication statusPublished - 1993

    Keywords

    • METIS-112118

    Cite this

    @article{77c3486970d74b97b982196848b0b713,
    title = "Review of excitation and detection mechanisms for micromechanical resonators",
    keywords = "METIS-112118",
    author = "A. Prak and Lammerink, {Theodorus S.J.} and J.H.J. Fluitman",
    year = "1993",
    language = "Undefined",
    pages = "143--181",
    journal = "Sensors and materials",
    issn = "0914-4935",
    publisher = "M Y U Scientific Publishing Division",
    number = "5:3",

    }

    Review of excitation and detection mechanisms for micromechanical resonators. / Prak, A.; Lammerink, Theodorus S.J.; Fluitman, J.H.J.

    In: Sensors and materials, No. 5:3, 1993, p. 143-181.

    Research output: Contribution to journalArticleAcademicpeer-review

    TY - JOUR

    T1 - Review of excitation and detection mechanisms for micromechanical resonators

    AU - Prak, A.

    AU - Lammerink, Theodorus S.J.

    AU - Fluitman, J.H.J.

    PY - 1993

    Y1 - 1993

    KW - METIS-112118

    M3 - Article

    SP - 143

    EP - 181

    JO - Sensors and materials

    JF - Sensors and materials

    SN - 0914-4935

    IS - 5:3

    ER -