Abstract
Switched capacitors based on radio frequency microelectromechanical systems (RF MEMS) can enable a breakthrough in radio technology. Their switching principle is based on the mechanical movement of the plates of a parallel plate capacitor using the electrostatic force. The resulting difference in capacitance is used to switch an RF signal. This article discusses the device physics and application of these Microsystems.
Original language | English |
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Pages (from-to) | 24-30 |
Number of pages | 7 |
Journal | Future fab international |
Volume | 24 |
Publication status | Published - 2 Jan 2008 |