RF MEMS Switches for Mobile Communication

Peter Steeneken, Rudolf Herfst, Hilco Suy, Martijn Goossens, Joost van Beek, Jeroen Bielen, Jiri Stulemeijer, Jurriaan Schmitz

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    Switched capacitors based on radio frequency microelectromechanical systems (RF MEMS) can enable a breakthrough in radio technology. Their switching principle is based on the mechanical movement of the plates of a parallel plate capacitor using the electrostatic force. The resulting difference in capacitance is used to switch an RF signal. This article discusses the device physics and application of these Microsystems.
    Original languageEnglish
    Pages (from-to)24-30
    Number of pages7
    JournalFuture fab international
    Publication statusPublished - 2 Jan 2008


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