Switched capacitors based on radio frequency microelectromechanical systems (RF MEMS) can enable a breakthrough in radio technology. Their switching principle is based on the mechanical movement of the plates of a parallel plate capacitor using the electrostatic force. The resulting difference in capacitance is used to switch an RF signal. This article discusses the device physics and application of these Microsystems.
|Number of pages||7|
|Journal||Future fab international|
|Publication status||Published - 2 Jan 2008|