R.F. Planar magnetron sputtered ZnO films II: electrical properties

F.R. Blom, F.C.M. van de Pol, G. Bauhuis, Th.J.A. Popma

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    Abstract

    The electrical properties of r.f. planar magnetron sputtered ZnO films are studied by means of current-voltage, capacitance-voltage and Van der Pauw measurements. These films are applied as piezoelectric transducers in micromechanical sensors and actuators. Their piezoelectric behaviour strongly depends on the electric properties. A conduction model for the polycrystalline ZnO layers is presented. This model gives a good description of the electrical behaviour, and is useful in understanding the piezoelectric properties of the films studied.
    Original languageEnglish
    Pages (from-to)365-376
    JournalThin solid films
    Volume204
    Issue number2
    DOIs
    Publication statusPublished - 1991

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