R.F. Planar magnetron sputtered ZnO films II: electrical properties

F.R. Blom; F.C.M. van de Pol; G. Bauhuis; Th.J.A. Popma

doi:10.1016/0040-6090(91)90075-9

R.F. Planar magnetron sputtered ZnO films II: electrical properties

F.R. Blom
, F.C.M. van de Pol
, G. Bauhuis
, Th.J.A. Popma

Research output: Contribution to journal › Article › Academic › peer-review

59 Citations (Scopus)

340 Downloads (Pure)

Abstract

The electrical properties of r.f. planar magnetron sputtered ZnO films are studied by means of current-voltage, capacitance-voltage and Van der Pauw measurements. These films are applied as piezoelectric transducers in micromechanical sensors and actuators. Their piezoelectric behaviour strongly depends on the electric properties. A conduction model for the polycrystalline ZnO layers is presented. This model gives a good description of the electrical behaviour, and is useful in understanding the piezoelectric properties of the films studied.

Original language	English
Pages (from-to)	365-376
Journal	Thin solid films
Volume	204
Issue number	2
DOIs	https://doi.org/10.1016/0040-6090(91)90075-9
Publication status	Published - 1991

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title = "R.F. Planar magnetron sputtered ZnO films II: electrical properties",

abstract = "The electrical properties of r.f. planar magnetron sputtered ZnO films are studied by means of current-voltage, capacitance-voltage and Van der Pauw measurements. These films are applied as piezoelectric transducers in micromechanical sensors and actuators. Their piezoelectric behaviour strongly depends on the electric properties. A conduction model for the polycrystalline ZnO layers is presented. This model gives a good description of the electrical behaviour, and is useful in understanding the piezoelectric properties of the films studied.",

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AU - Blom, F.R.

AU - van de Pol, F.C.M.

AU - Bauhuis, G.

AU - Popma, Th.J.A.

PY - 1991

Y1 - 1991

N2 - The electrical properties of r.f. planar magnetron sputtered ZnO films are studied by means of current-voltage, capacitance-voltage and Van der Pauw measurements. These films are applied as piezoelectric transducers in micromechanical sensors and actuators. Their piezoelectric behaviour strongly depends on the electric properties. A conduction model for the polycrystalline ZnO layers is presented. This model gives a good description of the electrical behaviour, and is useful in understanding the piezoelectric properties of the films studied.

AB - The electrical properties of r.f. planar magnetron sputtered ZnO films are studied by means of current-voltage, capacitance-voltage and Van der Pauw measurements. These films are applied as piezoelectric transducers in micromechanical sensors and actuators. Their piezoelectric behaviour strongly depends on the electric properties. A conduction model for the polycrystalline ZnO layers is presented. This model gives a good description of the electrical behaviour, and is useful in understanding the piezoelectric properties of the films studied.

U2 - 10.1016/0040-6090(91)90075-9

DO - 10.1016/0040-6090(91)90075-9

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VL - 204

SP - 365

EP - 376

JO - Thin solid films

JF - Thin solid films

IS - 2

ER -

R.F. Planar magnetron sputtered ZnO films II: electrical properties

Abstract

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