Robust UV/VUV/EUV PureB photodiode detector technology with high CMOS Compatibility

Lis K. Nanver, Lin Qi, Vahid Mohammadi, K. R.M. Mok, Wiebe B. De Boer, Negin Golshani, Amir Sammak, Thomas L.M. Scholtes, Alexander Gottwald, Udo Kroth, Frank Scholze

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38 Citations (Scopus)

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Physics & Astronomy

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