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Robust UV/VUV/EUV PureB photodiode detector technology with high CMOS Compatibility
Lis K. Nanver, Lin Qi, Vahid Mohammadi, K. R.M. Mok, Wiebe B. De Boer, Negin Golshani, Amir Sammak, Thomas L.M. Scholtes, Alexander Gottwald, Udo Kroth, Frank Scholze
Research output: Contribution to journal › Article › Academic › peer-review
38
Citations
(Scopus)