Room Temperature SiO2 films by Multipolar ECR PECVD

I.G. Isai, A.Y. Kovalgin, J. Holleman, P.H. Woerlee, H. Wallinga

    Research output: Contribution to conferencePosterAcademic

    Original languageEnglish
    Publication statusPublished - 2001
    Event13th European Conference on Chemical Vapor Deposition 2001 - Athens, Greece
    Duration: 26 Aug 200131 Aug 2001

    Conference

    Conference13th European Conference on Chemical Vapor Deposition 2001
    CountryGreece
    CityAthens
    Period26/08/0131/08/01

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