Room Temperature SiO₂ films by Multipolar ECR PECVD

I.G. Isai, A.Y. Kovalgin, J. Holleman, P.H. Woerlee, H. Wallinga

Research output: Contribution to conference › Poster › Academic

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2001
Room Temperature SiO₂ Films Deposited by Multipolar ECR PECVD
Isai, I. G., Kovalgin, A. Y., Holleman, J., Woerlee, P. H. & Wallinga, H., 2001, In: Journal de physique IV. 11, Pr3, p. 747-753
Research output: Contribution to journal › Conference article › Academic › peer-review