Rotational precision mems-based clamping mechanism for stable fixation of elastic mechanisms

Dannis Michel Brouwer; B.R. de Jong; Meint J. de Boer; Herman Soemers

Rotational precision mems-based clamping mechanism for stable fixation of elastic mechanisms

Dannis Michel Brouwer, B.R. de Jong, Meint J. de Boer, Herman Soemers

Faculty of Engineering Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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Abstract

Conventional TEM sample manipulators often lack the crucial stability of 0.1 nm/min. A MEMS manipulator attached directly to the TEM pole would greatly increase both thermal and dynamic stability. However a stable E-beam requires no interference of electric or magnetic fields. Therefore the manipulator should be stably fixed without power. To this end a mechanical clamp is presented which clamps one of the actuators of the TEM sample manipulator (Figure 2). The clamp incorporates a relatively large clamp force of 0.5 mN with respect to the device area and is able to maintain the clamp force without external power. In previous work [1] a theoretical basis has been presented of an earlier clamp version. In this paper a rotational clamp which has been made and tested is presented. This clamp design is part of a research project for a 6 Degree of Freedom MEMS TEM sample manipulator.

Original language	Undefined
Title of host publication	Proceedings of the Annual Meeting of the American Society of Precision Engineering (ASPE)
Editors	Unknown ED
Place of Publication	Raleigh
Publisher	American Society of Precision Engineering
Pages	275-278
Number of pages	4
Publication status	Published - 2006
Event	21st ASPE Annual Meeting 2006 - Monterey, United States Duration: 15 Oct 2006 → 20 Oct 2006 Conference number: 21 http://www.aspe.net/publications/Annual_2006/Annual_06.html

Publication series

Name	MEMS, LIGA & Nanotechnology
Publisher	American Society for Precision Engineering

Conference

Conference	21st ASPE Annual Meeting 2006
Country/Territory	United States
City	Monterey
Period	15/10/06 → 20/10/06
Internet address	http://www.aspe.net/publications/Annual_2006/Annual_06.html

Keywords

EWI-9145
IR-66888
METIS-235271

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Cite this

Brouwer, Dannis Michel ; de Jong, B.R. ; de Boer, Meint J. et al. / Rotational precision mems-based clamping mechanism for stable fixation of elastic mechanisms. Proceedings of the Annual Meeting of the American Society of Precision Engineering (ASPE). editor / Unknown ED. Raleigh : American Society of Precision Engineering, 2006. pp. 275-278 (MEMS, LIGA & Nanotechnology).

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title = "Rotational precision mems-based clamping mechanism for stable fixation of elastic mechanisms",

abstract = "Conventional TEM sample manipulators often lack the crucial stability of 0.1 nm/min. A MEMS manipulator attached directly to the TEM pole would greatly increase both thermal and dynamic stability. However a stable E-beam requires no interference of electric or magnetic fields. Therefore the manipulator should be stably fixed without power. To this end a mechanical clamp is presented which clamps one of the actuators of the TEM sample manipulator (Figure 2). The clamp incorporates a relatively large clamp force of 0.5 mN with respect to the device area and is able to maintain the clamp force without external power. In previous work [1] a theoretical basis has been presented of an earlier clamp version. In this paper a rotational clamp which has been made and tested is presented. This clamp design is part of a research project for a 6 Degree of Freedom MEMS TEM sample manipulator.",

keywords = "EWI-9145, IR-66888, METIS-235271",

author = "Brouwer, {Dannis Michel} and {de Jong}, B.R. and {de Boer}, {Meint J.} and Herman Soemers",

year = "2006",

language = "Undefined",

series = "MEMS, LIGA & Nanotechnology",

publisher = "American Society of Precision Engineering",

pages = "275--278",

editor = "{Unknown ED}",

booktitle = "Proceedings of the Annual Meeting of the American Society of Precision Engineering (ASPE)",

note = "null ; Conference date: 15-10-2006 Through 20-10-2006",

url = "http://www.aspe.net/publications/Annual_2006/Annual_06.html",

}

Brouwer, DM, de Jong, BR, de Boer, MJ & Soemers, H 2006, Rotational precision mems-based clamping mechanism for stable fixation of elastic mechanisms. in Unknown ED (ed.), Proceedings of the Annual Meeting of the American Society of Precision Engineering (ASPE). MEMS, LIGA & Nanotechnology, American Society of Precision Engineering, Raleigh, pp. 275-278, 21st ASPE Annual Meeting 2006, Monterey, California, United States, 15/10/06.

Rotational precision mems-based clamping mechanism for stable fixation of elastic mechanisms. / Brouwer, Dannis Michel; de Jong, B.R.; de Boer, Meint J. et al.

Proceedings of the Annual Meeting of the American Society of Precision Engineering (ASPE). ed. / Unknown ED. Raleigh : American Society of Precision Engineering, 2006. p. 275-278 (MEMS, LIGA & Nanotechnology).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Rotational precision mems-based clamping mechanism for stable fixation of elastic mechanisms

AU - Brouwer, Dannis Michel

AU - de Jong, B.R.

AU - de Boer, Meint J.

AU - Soemers, Herman

N1 - Conference code: 21

PY - 2006

Y1 - 2006

N2 - Conventional TEM sample manipulators often lack the crucial stability of 0.1 nm/min. A MEMS manipulator attached directly to the TEM pole would greatly increase both thermal and dynamic stability. However a stable E-beam requires no interference of electric or magnetic fields. Therefore the manipulator should be stably fixed without power. To this end a mechanical clamp is presented which clamps one of the actuators of the TEM sample manipulator (Figure 2). The clamp incorporates a relatively large clamp force of 0.5 mN with respect to the device area and is able to maintain the clamp force without external power. In previous work [1] a theoretical basis has been presented of an earlier clamp version. In this paper a rotational clamp which has been made and tested is presented. This clamp design is part of a research project for a 6 Degree of Freedom MEMS TEM sample manipulator.

AB - Conventional TEM sample manipulators often lack the crucial stability of 0.1 nm/min. A MEMS manipulator attached directly to the TEM pole would greatly increase both thermal and dynamic stability. However a stable E-beam requires no interference of electric or magnetic fields. Therefore the manipulator should be stably fixed without power. To this end a mechanical clamp is presented which clamps one of the actuators of the TEM sample manipulator (Figure 2). The clamp incorporates a relatively large clamp force of 0.5 mN with respect to the device area and is able to maintain the clamp force without external power. In previous work [1] a theoretical basis has been presented of an earlier clamp version. In this paper a rotational clamp which has been made and tested is presented. This clamp design is part of a research project for a 6 Degree of Freedom MEMS TEM sample manipulator.

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KW - IR-66888

KW - METIS-235271

M3 - Conference contribution

T3 - MEMS, LIGA & Nanotechnology

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EP - 278

BT - Proceedings of the Annual Meeting of the American Society of Precision Engineering (ASPE)

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PB - American Society of Precision Engineering

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