Conventional TEM sample manipulators often lack the crucial stability of 0.1 nm/min. A MEMS manipulator attached directly to the TEM pole would greatly increase both thermal and dynamic stability. However a stable E-beam requires no interference of electric or magnetic fields. Therefore the manipulator should be stably fixed without power. To this end a mechanical clamp is presented which clamps one of the actuators of the TEM sample manipulator (Figure 2). The clamp incorporates a relatively large clamp force of 0.5 mN with respect to the device area and is able to maintain the clamp force without external power. In previous work  a theoretical basis has been presented of an earlier clamp version. In this paper a rotational clamp which has been made and tested is presented. This clamp design is part of a research project for a 6 Degree of Freedom MEMS TEM sample manipulator.
|Title of host publication||Proceedings of the Annual Meeting of the American Society of Precision Engineering (ASPE)|
|Place of Publication||Raleigh|
|Publisher||American Society of Precision Engineering|
|Number of pages||4|
|Publication status||Published - 2006|
|Event||21st ASPE Annual Meeting 2006 - Monterey, United States|
Duration: 15 Oct 2006 → 20 Oct 2006
Conference number: 21
|Name||MEMS, LIGA & Nanotechnology|
|Publisher||American Society for Precision Engineering|
|Conference||21st ASPE Annual Meeting 2006|
|Period||15/10/06 → 20/10/06|
Brouwer, D. M., de Jong, B. R., de Boer, M. J., & Soemers, H. (2006). Rotational precision mems-based clamping mechanism for stable fixation of elastic mechanisms. In Unknown ED (Ed.), Proceedings of the Annual Meeting of the American Society of Precision Engineering (ASPE) (pp. 275-278). (MEMS, LIGA & Nanotechnology). Raleigh: American Society of Precision Engineering.