Rotational precision mems-based clamping mechanism for stable fixation of elastic mechanisms

Dannis Michel Brouwer, B.R. de Jong, Meint J. de Boer, Herman Soemers

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Conventional TEM sample manipulators often lack the crucial stability of 0.1 nm/min. A MEMS manipulator attached directly to the TEM pole would greatly increase both thermal and dynamic stability. However a stable E-beam requires no interference of electric or magnetic fields. Therefore the manipulator should be stably fixed without power. To this end a mechanical clamp is presented which clamps one of the actuators of the TEM sample manipulator (Figure 2). The clamp incorporates a relatively large clamp force of 0.5 mN with respect to the device area and is able to maintain the clamp force without external power. In previous work [1] a theoretical basis has been presented of an earlier clamp version. In this paper a rotational clamp which has been made and tested is presented. This clamp design is part of a research project for a 6 Degree of Freedom MEMS TEM sample manipulator.
Original languageUndefined
Title of host publicationProceedings of the Annual Meeting of the American Society of Precision Engineering (ASPE)
Editors Unknown ED
Place of PublicationRaleigh
PublisherAmerican Society of Precision Engineering
Number of pages4
Publication statusPublished - 2006
Event21st ASPE Annual Meeting 2006 - Monterey, United States
Duration: 15 Oct 200620 Oct 2006
Conference number: 21

Publication series

NameMEMS, LIGA & Nanotechnology
PublisherAmerican Society for Precision Engineering


Conference21st ASPE Annual Meeting 2006
Country/TerritoryUnited States
Internet address


  • EWI-9145
  • IR-66888
  • METIS-235271

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