Rotational precision MEMS-based clamping mechanism for stable fixation of elastic mechanisms

A mechanical clamp is presented which clamps one of the actuators of the MEMS-based TEM sample manipulator. The clamp incorporates a relatively large clamp force of 0.5 mN and is able to maintain the clamp force without external power. Although compliant mechanism design in MEMS design requires extra attention because of the relatively large deflections, small actuations forces and relatively large actuation stiffness, the real challenge lays in designing within the limited fabrication techniques. Though still in development, the fabrication technique proposed offers 35 μm high mechanisms with a trench width bandwidth of 3-20μm. The fabrication technique is compatible with the fabrication of a 6 Degree-of-freedom manipulator