Roughening effects during silicon CVD studied by the use of hemispherical substrates

Johannes G.E. Gardeniers, M.M.W. Mooren, L.J. Giling

Research output: Contribution to journal › Article › Academic › peer-review

Keywords

@article{1c523a2f3a034af6a0a8b8c7dac48281,

title = "Roughening effects during silicon CVD studied by the use of hemispherical substrates",

keywords = "METIS-112091",

author = "Gardeniers, {Johannes G.E.} and M.M.W. Mooren and L.J. Giling",

year = "1990",

language = "Undefined",

volume = "0",

pages = "85--102",

journal = "Surface science",

issn = "0039-6028",

publisher = "Elsevier",

number = "236",

}