Roughness evolution of Si surfaces upon Ar ion erosion

V.I.T.A. de Rooij-Lohmann; I.V. Kozhevnikov; L. Peverini; E. Ziegler; R. Cuerno; Frederik Bijkerk; Andrey Yakshin

doi:10.1016/j.apsusc.2010.03.045

Roughness evolution of Si surfaces upon Ar ion erosion

V.I.T.A. de Rooij-Lohmann, I.V. Kozhevnikov, L. Peverini, E. Ziegler, R. Cuerno, Frederik Bijkerk, Andrey Yakshin

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Abstract

We studied the roughness evolution of Si surfaces upon Ar ion erosion in real time. Following the theory of surface kinetic roughening, a model proposed by Majaniemi was used to obtain the value of the dynamic scaling exponent β from our data. The model was found to explain both the observed roughening and the smoothening of the surfaces. The values of the scaling exponents α and β, important for establishing a universal model for ion erosion of (Si) surfaces, have been determined. The value of β proved to increase with decreasing ion energy, while the static scaling exponent α was found to be ion energy independent

Original language	English
Pages (from-to)	5011-5014
Number of pages	4
Journal	Applied surface science
Volume	256
Issue number	16
DOIs	https://doi.org/10.1016/j.apsusc.2010.03.045
Publication status	Published - 2010

Keywords

METIS-270288
IR-75240

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10.1016/j.apsusc.2010.03.045

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title = "Roughness evolution of Si surfaces upon Ar ion erosion",

abstract = "We studied the roughness evolution of Si surfaces upon Ar ion erosion in real time. Following the theory of surface kinetic roughening, a model proposed by Majaniemi was used to obtain the value of the dynamic scaling exponent β from our data. The model was found to explain both the observed roughening and the smoothening of the surfaces. The values of the scaling exponents α and β, important for establishing a universal model for ion erosion of (Si) surfaces, have been determined. The value of β proved to increase with decreasing ion energy, while the static scaling exponent α was found to be ion energy independent",

keywords = "METIS-270288, IR-75240",

author = "{de Rooij-Lohmann}, V.I.T.A. and I.V. Kozhevnikov and L. Peverini and E. Ziegler and R. Cuerno and Frederik Bijkerk and Andrey Yakshin",

year = "2010",

doi = "10.1016/j.apsusc.2010.03.045",

language = "English",

volume = "256",

pages = "5011--5014",

journal = "Applied surface science",

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T1 - Roughness evolution of Si surfaces upon Ar ion erosion

AU - de Rooij-Lohmann, V.I.T.A.

AU - Kozhevnikov, I.V.

AU - Peverini, L.

AU - Ziegler, E.

AU - Cuerno, R.

AU - Bijkerk, Frederik

AU - Yakshin, Andrey

PY - 2010

Y1 - 2010

N2 - We studied the roughness evolution of Si surfaces upon Ar ion erosion in real time. Following the theory of surface kinetic roughening, a model proposed by Majaniemi was used to obtain the value of the dynamic scaling exponent β from our data. The model was found to explain both the observed roughening and the smoothening of the surfaces. The values of the scaling exponents α and β, important for establishing a universal model for ion erosion of (Si) surfaces, have been determined. The value of β proved to increase with decreasing ion energy, while the static scaling exponent α was found to be ion energy independent

AB - We studied the roughness evolution of Si surfaces upon Ar ion erosion in real time. Following the theory of surface kinetic roughening, a model proposed by Majaniemi was used to obtain the value of the dynamic scaling exponent β from our data. The model was found to explain both the observed roughening and the smoothening of the surfaces. The values of the scaling exponents α and β, important for establishing a universal model for ion erosion of (Si) surfaces, have been determined. The value of β proved to increase with decreasing ion energy, while the static scaling exponent α was found to be ion energy independent

KW - METIS-270288

KW - IR-75240

U2 - 10.1016/j.apsusc.2010.03.045

DO - 10.1016/j.apsusc.2010.03.045

M3 - Article

SN - 0169-4332

VL - 256

SP - 5011

EP - 5014

JO - Applied surface science

JF - Applied surface science

IS - 16

ER -

Roughness evolution of Si surfaces upon Ar ion erosion

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Keywords

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