Roughness evolution of Si surfaces upon Ar ion erosion

V.I.T.A. de Rooij-Lohmann, I.V. Kozhevnikov, L. Peverini, E. Ziegler, R. Cuerno, Frederik Bijkerk, Andrey Yakshin

Research output: Contribution to journalArticleAcademicpeer-review

9 Citations (Scopus)

Abstract

We studied the roughness evolution of Si surfaces upon Ar ion erosion in real time. Following the theory of surface kinetic roughening, a model proposed by Majaniemi was used to obtain the value of the dynamic scaling exponent β from our data. The model was found to explain both the observed roughening and the smoothening of the surfaces. The values of the scaling exponents α and β, important for establishing a universal model for ion erosion of (Si) surfaces, have been determined. The value of β proved to increase with decreasing ion energy, while the static scaling exponent α was found to be ion energy independent
Original languageEnglish
Pages (from-to)5011-5014
Number of pages4
JournalApplied surface science
Volume256
Issue number16
DOIs
Publication statusPublished - 2010

Keywords

  • METIS-270288
  • IR-75240

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