Roughness reduction through chemical etching of amorphized residues

S.M. Martinussen, M. Dijkstra, S.M. García Blanco

Optical Sciences

Research output: Contribution to conference › Poster

Original language	English
Publication status	Published - 14 Jun 2017

Cite this

Martinussen, S. M., Dijkstra, M., & García Blanco, S. M. (2017). Roughness reduction through chemical etching of amorphized residues.