Roughness reduction through chemical etching of amorphized residues

S.M. Martinussen, M. Dijkstra, S.M. García Blanco

Research output: Contribution to conferencePosterOther research output

Original languageEnglish
Publication statusPublished - 14 Jun 2017
EventPhotonics event - Veldhoven, Netherlands
Duration: 14 Jun 201714 Jun 2017

Conference

ConferencePhotonics event
CountryNetherlands
CityVeldhoven
Period14/06/1714/06/17

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