RTP annealings for high-quality LPCVD inter-polysilicon dielectric layers

J.H. Klootwijk, H. van Kranenburg, Marcel H.H. Weusthof, P.H. Woerlee, Hans Wallinga

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of the 8th workshop on dielectrics in microelectronics
    Place of PublicationVenice, Italy
    Number of pages2
    Publication statusPublished - 6 Nov 1996


    • METIS-113856

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