RTP annealings for high-quality LPCVD inter-polysilicon dielectric layers

J.H. Klootwijk, H. van Kranenburg, Marcel H.H. Weusthof, P.H. Woerlee, Hans Wallinga

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of the 8th workshop on dielectrics in microelectronics
Place of Publication	Venice, Italy
Pages	-
Number of pages	2
Publication status	Published - 6 Nov 1996

Keywords

@inproceedings{c441663853b346a483b2b25707b27d3e,

title = "RTP annealings for high-quality LPCVD inter-polysilicon dielectric layers",

keywords = "METIS-113856",

author = "J.H. Klootwijk and {van Kranenburg}, H. and Weusthof, {Marcel H.H.} and P.H. Woerlee and Hans Wallinga",

year = "1996",

month = nov,

day = "6",

language = "Undefined",

pages = "--",

booktitle = "Proceedings of the 8th workshop on dielectrics in microelectronics",

}

TY - GEN

T1 - RTP annealings for high-quality LPCVD inter-polysilicon dielectric layers

AU - Klootwijk, J.H.

AU - van Kranenburg, H.

AU - Weusthof, Marcel H.H.

AU - Woerlee, P.H.

AU - Wallinga, Hans

PY - 1996/11/6

Y1 - 1996/11/6

KW - METIS-113856

M3 - Conference contribution

SP - -

BT - Proceedings of the 8th workshop on dielectrics in microelectronics

CY - Venice, Italy

ER -