RTP annealings for high-quality LPCVD inter-polysilicon dielectric layers

J.H. Klootwijk, H. van Kranenburg, Marcel H.H. Weusthof, P.H. Woerlee, Hans Wallinga

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of the 8th workshop on dielectrics in microelectronics
    Place of PublicationVenice, Italy
    Pages-
    Number of pages2
    Publication statusPublished - 6 Nov 1996

    Keywords

    • METIS-113856

    Cite this

    Klootwijk, J. H., van Kranenburg, H., Weusthof, M. H. H., Woerlee, P. H., & Wallinga, H. (1996). RTP annealings for high-quality LPCVD inter-polysilicon dielectric layers. In Proceedings of the 8th workshop on dielectrics in microelectronics (pp. -). Venice, Italy.