RTP damage anneal studied by X-ray diffraction

J.G.E. Klappe, I. Barsony, Hans Wallinga

    Research output: Contribution to conferencePoster

    Original languageUndefined
    Pages-
    Publication statusPublished - 19 Nov 1991
    EventIOP/FOM Werkgemeenschap Halfgeleiders 1991 - Veldhoven, Netherlands
    Duration: 19 Nov 199120 Nov 1991

    Conference

    ConferenceIOP/FOM Werkgemeenschap Halfgeleiders 1991
    CountryNetherlands
    CityVeldhoven
    Period19/11/9120/11/91

    Keywords

    • METIS-117172

    Cite this

    Klappe, J. G. E., Barsony, I., & Wallinga, H. (1991). RTP damage anneal studied by X-ray diffraction. -. Poster session presented at IOP/FOM Werkgemeenschap Halfgeleiders 1991, Veldhoven, Netherlands.